ISOLATOR FOR A STATIONARY VIBRATION ISOLATION SYSTEM

• US 20170370441A1
• Filed: 06/09/2017
• Published: 12/28/2017
• Est. Priority Date: 06/23/2016
• Status: Active Grant

• Current Assignee: Integrated Dynamics Engineering GmbH (Aalberts NV)
• Original Assignee: Integrated Dynamics Engineering GmbH (Aalberts NV)
• Inventors: EVERS, Arndt, SCHARF, Till
• Granted Patent: US 10,634,210 B2
• Time in Patent Office: Days
• CPC Class Codes: F16F 15/0232 with at least one gas spring F16F15/027 takes precedence
• CPC Class Codes: F16F 15/027 comprising control arrangements F16F15/0237 takes precedence
• CPC Class Codes: F16F 15/0275 Control of stiffness
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.

Claims

1. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction,

wherein the isolator comprises at least one pneumatic actuator.

2. The isolator as claimed in claim 1, wherein the isolator comprises a spring.

3. The isolator as claimed in claim 2, wherein the spring is a pneumatic spring.

4. The isolator as claimed in claim 3, wherein the pneumatic actuator extends annularly around a piston of the pneumatic spring.

5. The isolator as claimed in claim 3, wherein the pneumatic actuator is arranged in a working space of the pneumatic spring.

6. The isolator as claimed in claim 1, wherein a piston of the pneumatic actuator is guided axially by at least two leaf springs that are spaced apart from each other.

7. The isolator as claimed in claim 1, wherein a piston of a pneumatic spring is also guided axially by the at least two leaf springs that are spaced apart from each other.

8. The isolator as claimed in claim 1, wherein the pneumatic actuator is effective in two spatial directions.

9. The isolator as claimed in claim 1, wherein the isolator comprises one actuator that is effective in a horizontal direction and one actuator that is effective in a vertical direction.

14. An active vibration isolation system, comprising at least one isolator as claimed in claim 1.

10. A pneumatic actuator for a stationary vibration isolation system, comprising an annular working space in which a piston is arranged.

11. The pneumatic actuator as claimed in claim 10, wherein the piston is spaced apart from a wall of the working space by a gap.

12. The pneumatic actuator as claimed in claim 10, wherein the piston divides the working space into two pressure chambers.

13. The pneumatic actuator as claimed in claim 11, wherein the working space is sealed by at least one membrane.

18. An active vibration isolation system, comprising at least one pneumatic actuator as claimed in claim 10.

15. An active vibration isolation system, comprising a control loop for controlling the pneumatic actuator, the control loop including a pressure sensor which measures the pressure within a working space of the pneumatic actuator, or a force sensor which measures the force exerted by the pneumatic actuator.

16. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction;

wherein the isolator comprises a pneumatic spring;

and wherein the isolator comprises at least one pneumatic actuator, which extends annularly around a piston of the pneumatic spring.

17. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction;

wherein the isolator comprises a spring; and

wherein the isolator comprises a first actuator that is effective in a horizontal direction and a second actuator that is effective in a vertical direction.