FLOW PASSAGE STRUCTURE, INTAKE AND EXHAUST MEMBER, AND PROCESSING APPARATUS

• US 20170372923A1
• Filed: 09/10/2015
• Published: 12/28/2017
• Est. Priority Date: 03/18/2015
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: TERADA, Takahiro, TANAKA, Masayuki, KATO, Shiguma
• Granted Patent: US 10,312,113 B2
• Time in Patent Office: Days
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: F17D 1/00 Pipe-line systems conveying articles or materials through a pipe- line by means of a fluid carrier B65G51/00, B65G53/00; liquids B67D; special devices for transferring liquids from bulk storage containers into vehicles or boats or vice versa, e.g. loading or unloading vehicles or portable containers B67D7/00; conveying material which has been excavated by a dredger or soil shifter through a pipe-line E02F7/10; sewer pipe-line systems E03F3/00; thermal insulation of pipe-lines F16L59/00; central heating systems F24D
• CPC Class Codes: F17D 1/04 for distribution of gas
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers

Abstract

A flow passage structure includes a member. The member includes a plurality of first openings, a plurality of second openings, a flow passage, and a plurality of joining and branching parts. The flow passage connects the first openings with the second openings. The joining and branching parts are provided in the flow passage and each have a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other. The second parts are closer to the second openings than the first parts are, in a path between the first opening and the second opening. The first ends are connected with the second ends in each joining and branching part.

Claims

1. A flow passage structure comprising:

a member provided with;

a plurality of first openings;

a plurality of second openings;

a flow passage connecting the first openings with the second openings; and

a plurality of joining and branching parts provided in the flow passage, the joining and branching parts each including a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other, the second parts being closer to the second openings than the first parts are, in a path between the first opening and the second opening, the first ends being connected with the second ends in each joining and branching part.

2. The flow passage structure according to claim 1, wherein paths between the first openings and each of the second openings in the flow passage have a uniform length.

3. The flow passage structure according to claim 1, wherein the joining and branching parts are provided in each of paths between the first openings and each of the second openings in the flow passage.

4. The flow passage structure according to claim 3, wherein the number of the joining and branching parts provided in each of paths between the first openings and each of the second openings in the flow passage is equal.

5. The flow passage structure according to claim 1, wherein the flow passage connects each of the first openings with all of the second openings.

6. An intake and exhaust member comprising:

a member that is connectable to a feeder capable of at least one of delivery and suction of fluid and is provided with;

a plurality of first openings;

a plurality of second openings;

a flow passage connecting the first openings with the second openings; and

a plurality of joining and branching parts provided in the flow passage, the joining and branching parts each including a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other, the second parts being closer to the second openings than the first parts are, in a path between the first opening and the second opening, the first ends being connected with the second ends in each joining and branching part.

7. A processing apparatus comprising:

a processing unit;

a member provided with;

a plurality of first openings,

a plurality of second openings facing the processing unit,

a flow passage connecting the first openings with the second openings, and

a plurality of joining and branching parts provided in the flow passage, the joining and branching parts each including a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other, the second parts being closer to the second openings than the first parts are, in a path between the first opening and the second opening, the first ends being connected with the second ends in each joining and branching part; and

a feeder connected to the member, the feeder being capable of at least one of;

introduction of fluid to the first openings; and

suction of fluid from the first openings.

8. The processing apparatus according to claim 7, wherein the feeder is capable of introducing first fluid to at least one of the first openings and introducing second fluid different from the first fluid to at least another one of the first openings.

9. The processing apparatus according to claim 7, wherein the feeder is capable of at least one of:

introduction of fluid to the first openings individually; and

suction of fluid from the first openings individually.