METHOD OF MANUFACTURING SEMICONDUCTOR UNIT AND THE SEMICONDUCTOR UNIT
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Abstract
In a solid-state imaging device including a plurality of pixels each pixel including a plurality of photodiodes, it is prevented that an incidence angle of incident light on the solid-state imaging device becomes large in a pixel in an end of the solid-state imaging device, causing a difference in output between the two photodiodes in the pixel, and thus autofocus detection accuracy is deteriorated. Photodiodes extending in a longitudinal direction of a pixel allay section are provided in each pixel. The photodiodes in the pixel are arranged in a direction orthogonal to the longitudinal direction of the pixel allay section.
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Citations
14 Claims
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1-8. -8. (canceled)
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9. A method of manufacturing a semiconductor unit comprising a solid-state imaging device including a plurality of pixels in a pixel array section, each pixel including a first photodiode and a second photodiode, the method comprising:
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(a) providing a semiconductor substrate; (b) forming a well region having a first conductivity type in a main surface of the semiconductor substrate; (c) after (b), forming a first semiconductor region having the first conductivity type in the main surface of the semiconductor substrate, the first semiconductor region extending in a first direction along the main surface of the semiconductor substrate; and (d) forming a second semiconductor region having a second conductivity type different from the first conductivity type in a top of the well region, the second semiconductor region overlapping with the first semiconductor region in plan view, wherein the second semiconductor region is divided by the first semiconductor region into a first portion that configures the first photodiode and a second portion that configures the second photodiode, and wherein a first pixel among the plurality of pixels is located closer to a first end of the pixel array section in a second direction orthogonal to the first direction than an opposite second end of the pixel array section in the second direction, and a width in the second direction of the first photodiode of the first pixel is smaller than a width in the second direction of the second photodiode of the first pixel. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification