TRENCH-BASED POWER SEMICONDUCTOR DEVICES WITH INCREASED BREAKDOWN VOLTAGE CHARACTERISTICS
First Claim
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1. A semiconductor device comprising:
- a plurality of primary trenches extending into the semiconductor region, each of the plurality of trenches having a first end, a second end, and opposing sidewalls lined with a dielectric layer, each trench further having a shield electrode;
an end trench extending into the semiconductor region and disposed adjacent to and spaced from the first ends of the primary trenches, the end trench having opposing sidewalls lined with a dielectric layer and an electrode disposed in the end trench; and
a gap region disposed between the end trench and the first ends of the primary trenches, the gap region being at a floating potential.
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Abstract
Exemplary power semiconductor devices with features providing increased breakdown voltage and other benefits are disclosed.
5 Citations
7 Claims
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1. A semiconductor device comprising:
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a plurality of primary trenches extending into the semiconductor region, each of the plurality of trenches having a first end, a second end, and opposing sidewalls lined with a dielectric layer, each trench further having a shield electrode; an end trench extending into the semiconductor region and disposed adjacent to and spaced from the first ends of the primary trenches, the end trench having opposing sidewalls lined with a dielectric layer and an electrode disposed in the end trench; and a gap region disposed between the end trench and the first ends of the primary trenches, the gap region being at a floating potential. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification