ACCELERATION SENSOR HAVING SPRING FORCE COMPENSATION
First Claim
1. An acceleration sensor (100) havinga sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110);
- first trim electrodes (140) which are connected to the sensor material (120); and
second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140), whereinwhen the sensor material (120) is deflected along the movement axis (x), a spring force (135) acting on the sensor material (120) is generated by the spring elements (130), and whereinwhen the sensor material (120) is deflected, an electrostatic force (145) acting on the sensor material (120), which counteracts the spring force (135), is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim electrodes (150).
1 Assignment
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Accused Products
Abstract
The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).
24 Citations
11 Claims
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1. An acceleration sensor (100) having
a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110); -
first trim electrodes (140) which are connected to the sensor material (120); and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140), wherein when the sensor material (120) is deflected along the movement axis (x), a spring force (135) acting on the sensor material (120) is generated by the spring elements (130), and wherein when the sensor material (120) is deflected, an electrostatic force (145) acting on the sensor material (120), which counteracts the spring force (135), is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim electrodes (150). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification