INSPECTING METHOD FOR INSPECTING INFLUENCE OF INSTALLATION ENVIRONMENT UPON PROCESSING APPARATUS

• US 20180025953A1
• Filed: 07/12/2017
• Published: 01/25/2018
• Est. Priority Date: 07/19/2016
• Status: Active Grant

• Current Assignee: Disco Corporation
• Original Assignee: Disco Corporation
• Inventors: Yoshihara, Hiroyuki
• Granted Patent: US 10,643,909 B2
• Time in Patent Office: Days
• CPC Class Codes: B23K 26/0626 Energy control of the laser beam B23K26/0622 takes precedence
• CPC Class Codes: B23K 26/08 Devices involving relative movement between laser beam and workpiece
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/2881 related to environmental aspects other than temperature, e.g. humidity or vibrations
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like
• CPC Class Codes: H01L 21/681 using optical controlling means
• CPC Class Codes: H01L 22/24 Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change voltage contrast G01R31/311

Abstract

A method for inspecting the influence of an installation environment upon a processing apparatus includes setting a mark for specifying a relative positional relation between a chuck table and a processing unit, imaging the mark plural times by using an imaging unit when a moving unit is at rest, and detecting the position of the mark from an image and then determining whether or not the influence of the installation environment upon the processing apparatus is present based on whether the change in position of the mark is less than or more than a threshold.

Claims

1. An inspecting method for inspecting the influence of an installation environment upon a processing apparatus including a chuck table for holding a workpiece, a processing unit processing said workpiece held on said chuck table, moving mechanism for relatively moving said chuck table and said processing unit, and an imaging unit fixed to said processing unit to image said workpiece held on said chuck table, said inspecting method comprising:

a mark setting step of setting a mark for specifying a relative positional relation between said chuck table and said processing unit;

an imaging step of imaging said mark plural times by using said imaging unit in the condition where said moving mechanism is at rest; and

a determining step of detecting the position of said mark from an image obtained by said imaging step and then determining whether or not the influence of said installation environment upon said processing apparatus is present;

said determining step being performed in such a manner that when the amount of change in position of said mark is less than a threshold, it is determined that the relative positional relation between said chuck table and said processing unit is not influenced by said installation environment, whereas when the amount of change in position of said mark is greater than or equal to said threshold, it is determined that the relative positional relation between said chuck table and said processing unit is influenced by said installation environment.

2. The inspecting method according to claim 1, wherein said imaging step includes setting the distance between said imaging unit and said chuck table so that said imaging unit focuses said mark, and next starting to image said mark.

3. The inspecting method according to claim 1, wherein said mark is set on said chuck table or on an object held on said chuck table.