INTERFEROMETER SYSTEM HAVING A CONTINUOUSLY VARIABLE BROADBAND REFLECTOR AND METHOD TO GENERATE AN INTERFERENCE SIGNAL OF A SURFACE OF A SAMPLE

• US 20180031415A1
• Filed: 10/12/2017
• Published: 02/01/2018
• Est. Priority Date: 06/10/2013
• Status: Active Application

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: HAITJEMA, Han, QUAEDACKERS, Johannes Anna, ZUIDERWEG, Adriaan Tiemen
• Application Number:
  US15/782,097
• Publication Number:
  US 20180031415A1
• Time in Patent Office: Days
• CPC Class Codes: G01B 9/02012 using temporal intensity variation
• CPC Class Codes: G01B 9/02067 by electronic control systems, i.e. using feedback acting on optics or light
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01J 1/02 Details
• CPC Class Codes: G02B 27/10 Beam splitting or combining systems polarising systems G02B27/28; mixing and splitting light signals using optical waveguides G02B6/28; beam shaping, e.g. changing the cross-sectional area, by dividing or superposing multiple light beams G02B27/0905
• CPC Class Codes: G02B 27/283 used for beam splitting or combining

Abstract

An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

Claims

1. An interferometer system to generate an interference signal of a surface of a sample comprising:

a broadband illuminator configured to provide a broadband illumination beam;

a beam splitter configured to split the broadband illumination beam into a reference beam for reflection on a reference reflector and into a measurement beam for reflection on the surface of the sample;

a detector configured to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal;

a continuous variable broadband reflector in at least one of the beam splitter and the reference reflector and configured to adjust the broadband radiation intensity balance between the measurement beam and the reference beam, the continuous variable broadband reflector comprising;

a temperature-dependent reflector which reflectivity is dependent on the temperature; and

a temperature adjuster configured to adjust the temperature of the temperature dependent reflector to adjust the reflectivity of the temperature dependent reflector;

a scanner configured to optically scan the surface of the sample and the reference reflector in the direction of the surface of the sample over a scanning distance while measuring the scanning distance and generating a scanning distance signal; and

,

a processor configured to receive the interference signal representing the interference radiation intensity during the scan from the detector and the distance signal from the scanner and combining both to form a correlogram displaying an interference radiation intensity as a function of the scanning distance.

2. The interferometer system according to claim 1, wherein the temperature dependent reflector comprises vanadium dioxide.

3. The interferometer system according to claim 2, wherein, if the temperature dependent reflector is larger than a critical temperature, the reflectivity is changed from a reflective state to a transmissive state.

4. The interferometer system according to claim 1, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

5. The interferometer system according to claim 2, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

6. The interferometer system according to claim 3, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

7. The interferometer system according to claim 1, wherein the temperature adjuster is a Peltier element for heating or cooling.

8. The interferometer system according to claim 2, wherein the temperature adjuster is a Peltier element for heating or cooling.

9. The interferometer system according to claim 3, wherein the temperature adjuster is a Peltier element for heating or cooling.

10. The interferometer system according to claim 4, wherein the temperature adjuster is a Peltier element for heating or cooling.

11. The interferometer system according to claim 5, wherein the temperature adjuster is a Peltier element for heating or cooling.

12. The interferometer system according to claim 6, wherein the temperature adjuster is a Peltier element for heating or cooling.

13. A method to generate an interference signal of a surface of a sample with an interferometer system, the method comprising:

emitting a broadband illumination beam;

splitting, by a beam splitter, the illumination beam into a reference beam for reflection on a reference reflector and into a measurement beam for reflection on the surface of the sample;

receiving an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample on a detector creating an interference signal;

adjusting the broadband radiation intensity balance between the measurement beam and the reference beam with a continuous variable broadband reflector in at least one of the beam splitter and the reference reflector, the adjusting comprising adjusting a temperature of a temperature dependent reflector to adjust the reflectivity of the temperature dependent reflector;

optically scanning the surface of the sample and the reference reflector in the direction of the surface of the sample over a scanning distance while measuring the scanning distance and generating a scanning distance signal; and

receiving the interference signal representing the interference radiation intensity during the scan from the detector and the scanning distance signal, and combining both to form a correlogram displaying an interference radiation intensity as a function of the scanning distance.

14. The interferometer system according to claim 13, wherein the temperature dependent reflector comprises vanadium dioxide.

15. The interferometer system according to claim 14, wherein, if the temperature dependent reflector is larger than a critical temperature, the reflectivity is changed from a reflective state to a transmissive state.

16. The interferometer system according to claim 13, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

17. The interferometer system according to claim 14, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

18. The interferometer system according to claim 15, wherein the temperature adjuster is a resistor connected to a power source to heat the temperature dependent reflector.

19. The interferometer system according to claim 13, wherein the temperature adjuster is a Peltier element for heating or cooling.

20. The interferometer system according to claim 14, wherein the temperature adjuster is a Peltier element for heating or cooling.

21. The interferometer system according to claim 15, wherein the temperature adjuster is a Peltier element for heating or cooling.

22. The interferometer system according to claim 16, wherein the temperature adjuster is a Peltier element for heating or cooling.

23. The interferometer system according to claim 17, wherein the temperature adjuster is a Peltier element for heating or cooling.

24. The interferometer system according to claim 18, wherein the temperature adjuster is a Peltier element for heating or cooling.