MULTI-ELECTRODE MOLECULAR SENSING DEVICES AND METHODS OF MAKING THE SAME
First Claim
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1. A method of manufacturing a molecular sensor, the method comprising:
- providing a substrate defining a substrate plane with a protrusion protruding from the substrate at an angle to the substrate plane;
depositing a first electrode layer in an orientation along a side of the protrusion to form a first electrode sheet at the angle to the substrate plane;
depositing an inner dielectric layer on the first electrode layer to form an inner dielectric sheet at the angle to the substrate plane;
depositing a second electrode layer on the inner dielectric layer to form a second electrode sheet at the angle to the substrate plane, wherein the first electrode sheet and the second electrode sheet form a pair of electrode sheets with the inner dielectric sheet between the first electrode sheet and the second electrode sheet;
depositing an outer dielectric layer on the second electrode layer to form an outer dielectric sheet at an angle to the substrate plane;
repeating the depositing of the first electrode layer, the inner dielectric layer, the second electrode layer, and the outer dielectric layer at least once to form a plurality of pairs of electrode sheets with an inner dielectric sheet between each electrode sheet in the pair of electrode sheets and an outer dielectric sheet between each pair of electrode sheets.
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Abstract
A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.
24 Citations
11 Claims
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1. A method of manufacturing a molecular sensor, the method comprising:
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providing a substrate defining a substrate plane with a protrusion protruding from the substrate at an angle to the substrate plane; depositing a first electrode layer in an orientation along a side of the protrusion to form a first electrode sheet at the angle to the substrate plane; depositing an inner dielectric layer on the first electrode layer to form an inner dielectric sheet at the angle to the substrate plane; depositing a second electrode layer on the inner dielectric layer to form a second electrode sheet at the angle to the substrate plane, wherein the first electrode sheet and the second electrode sheet form a pair of electrode sheets with the inner dielectric sheet between the first electrode sheet and the second electrode sheet; depositing an outer dielectric layer on the second electrode layer to form an outer dielectric sheet at an angle to the substrate plane; repeating the depositing of the first electrode layer, the inner dielectric layer, the second electrode layer, and the outer dielectric layer at least once to form a plurality of pairs of electrode sheets with an inner dielectric sheet between each electrode sheet in the pair of electrode sheets and an outer dielectric sheet between each pair of electrode sheets. - View Dependent Claims (2, 3, 4, 5, 7, 8, 9, 10, 11)
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6. The method of claim 16, wherein forming the groove includes:
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removing portions of the inner dielectric sheet; and stopping further removal of the inner dielectric sheet based on an electrical, capacitance, or optical measurement between the pair of electrode sheets.
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Specification