COMPOSITE VIBRATORY IN-PLANE ACCELEROMETER
First Claim
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1. A composite mass system, comprising:
- a sense mass, wherein the sense mass responds to an inertial force in a first direction at a first frequency;
a drive mass mechanically coupled to the sense mass, wherein the drive mass is driven in the first direction at a second frequency;
a first time-domain switch configured to generate an output voltage based on a first current generated in part by the sense mass; and
logic in signal communication with the first time-domain switch and configured to determine a time interval based on the output voltage.
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Abstract
Systems and methods are described herein for detecting and measuring inertial parameters, such as acceleration. In particular, the systems and methods relate to vibratory inertial sensors implementing time-domain sensing techniques. Within a composite mass sensor system, a sense mass may oscillate at a frequency different from its actuation frequency, allowing flexibility when integrating the sensor into drive systems without sacrificing sensitivity.
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Citations
27 Claims
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1. A composite mass system, comprising:
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a sense mass, wherein the sense mass responds to an inertial force in a first direction at a first frequency; a drive mass mechanically coupled to the sense mass, wherein the drive mass is driven in the first direction at a second frequency; a first time-domain switch configured to generate an output voltage based on a first current generated in part by the sense mass; and logic in signal communication with the first time-domain switch and configured to determine a time interval based on the output voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for determining an inertial parameter, comprising:
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responding to an inertial force with a sense mass in a first direction at a first frequency; driving, in the first direction at a second frequency, a drive mass mechanically coupled to the sense mass; generating, from a first time-domain switch, an output voltage based on a first current generated in part by the sense mass; and determining a time interval based on the output voltage. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification