SYSTEMS AND METHODS FOR DETECTING INERTIAL PARAMETERS USING A VIBRATORY ACCELEROMETER WITH MULTIPLE DEGREES OF FREEDOM

• US 20180031603A1
• Filed: 09/15/2016
• Published: 02/01/2018
• Est. Priority Date: 07/27/2016
• Status: Abandoned Application

• Current Assignee: Google LLC (Alphabet Inc.)
• Original Assignee: Lumedyne Technologies Incorporated (Alphabet Inc.)
• Inventors: Huang, Xiaojun, Anac, Ozan, Akgul, Mehmet
• Application Number:
  US15/267,024
• Publication Number:
  US 20180031603A1
• Time in Patent Office: Days
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/14 by making use of gyroscopes gyroscopes per se G01C19/00
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

Systems and methods are described herein for determining an inertial parameter. In particular, the systems and methods relate to multiple degrees of freedom inertial sensors implementing time-domain sensing techniques. Within a multiple degrees of freedom inertial sensor system, sense masses may respond to actuation with more than one natural frequency mode, each corresponding to a characteristic motion. Measurement of the inertial parameter can be conducted in the differential natural frequency mode using differential sensing techniques to remove common mode error. The inertial parameter can be acceleration in the vertical dimension. The inertial parameter can be acceleration in the horizontal dimension.

Claims

1. An inertial device having multiple degrees of freedom for determining an inertial parameter, the inertial device comprising:

a first sense mass with a first degree of freedom;

a second sense mass mechanically coupled to the first sense mass and with a second degree of freedom;

a first time domain switch coupled to the first sense mass, and a second time domain switch coupled to the second sense mass;

a drive structure configured to oscillate the first sense mass and the second sense mass in a differential frequency mode, wherein the first time domain switch and the second time domain switch each produce an electrical signal in response to oscillations of the first sense mass and the second sense mass; and

a processor in signal communication with the first time domain switch and the second time domain switch, and configured to determine an inertial parameter based in part on time intervals produced by the electrical signal.

2. The inertial device of claim 1, wherein as the first sense mass and the second sense mass oscillate in the differential frequency mode, the first time domain switch and the second time domain switch produce a differential signal.

3. The inertial device of claim 2, the inertial device further comprising:

coupling springs mechanically coupled to the first sense mass and to the second sense mass;

anchoring springs independently mechanically coupled to each of the first sense mass and the second sense mass and a central anchoring structure, and wherein the central anchoring structure is rigidly coupled to a support structure.

4. The inertial device of claim 3, wherein the inertial parameter is determined using a spring constant of the respective anchoring springs and a spring constant of the coupling springs to reduce the frequency of the differential frequency mode.

5. The inertial device of claim 4, wherein a common mode frequency component of the electrical signal produced by the first time domain switch and the second time domain switch is substantially eliminated from the differential signal.

6. The inertial device of claim 5, wherein the first degree of freedom and the second degree of freedom are in a vertical dimension.

7. The inertial device of claim 6, wherein the inertial parameter is acceleration in the vertical dimension.

8. The inertial device of claim 7, wherein the first time domain switch further comprises:

a first electrode at a first radial distance of the first sense mass;

a second electrode at a second radial distance of the first sense mass; and

as the first sense mass and the second sense mass oscillate at the differential frequency mode, the processor is configured to detect a differential in capacitance of the first electrode and the second electrode.

9. The inertial device of claim 8, wherein the time intervals are based in part on the times at which the differential in capacitance is equal to zero.

10. The inertial device of claim 9, wherein the first sense mass and the second sense mass raise and lower in the vertical dimension above the support structure.

11. The inertial device of claim 9, wherein the first sense mass and the second sense mass oscillate in vertical torsional rotation about the central anchoring structure.

12. A method of determining an inertial parameter using multiple degrees of freedom, the method comprising:

oscillating a first sense mass in a first degree of freedom;

oscillating a second sense mass mechanically coupled to the first sense mass and with a second degree of freedom;

coupling a first time domain switch to the first sense mass, and a second time domain switch to the second sense mass;

producing an electrical signal in response to oscillations of the first sense mass and the second sense mass from each of the first time domain switch and the second time domain switch, and wherein a drive structure oscillates the first sense mass and the second sense mass at a differential frequency mode; and

determining an inertial parameter based in part on time intervals produced by the electrical signal.

13. The method of claim 12, further comprising producing a differential signal from the first sense mass and the second sense mass as the first sense mass and the second sense mass oscillate in the differential frequency mode.

14. The method of claim 13, further comprising:

mechanically coupling the first sense mass to the second sense mass with coupling springs;

mechanically coupling each of the first sense mass and the second sense mass to a central anchoring structure with anchoring springs, and wherein the central anchoring structure is rigidly coupled to a support structure.

15. The method of claim 14, further comprising determining the inertial parameter using a spring constant of the respective anchoring springs and a spring constant of the coupling springs and reducing the frequency of the differential frequency mode.

16. The method of claim 15, further comprising eliminating a common mode frequency component of the electrical signal produced by the first time domain switch and the second time domain switch from the differential signal.

17. The method of claim 16, wherein oscillating the first sense mass in the first degree of freedom and oscillating the second sense mass mechanically coupled to the first sense mass in the second degree of freedom further comprises:

wherein the first degree of freedom and the second degree of freedom are in a vertical dimension.

18. The method of claim 17, wherein determining the inertial parameter based in part on time intervals produced by the electrical signal further comprises wherein the inertial parameter is acceleration in the vertical dimension.

19. The method of claim 18, wherein producing the electrical signal in response to oscillations of the first sense mass from the first time domain switch further comprises:

generating a capacitance from a first electrode at a first radial distance of the first sense mass;

generating a capacitance from a second electrode at a second radial distance of the first sense mass; and

as the first sense mass and the second sense mass oscillate at the differential frequency mode, detecting a differential in capacitance of the first electrode and the second electrode.

20. The method of claim 19, wherein determining the inertial parameter based in part on time intervals produced by the electrical signal further comprises wherein the time intervals are based in part on a plurality of times at which the differential in capacitance is equal to zero.

21. The method of claim 20, wherein oscillating the first sense mass in the first degree of freedom and oscillating the second sense mass mechanically coupled to the first sense mass in the second degree of freedom further comprises:

raising and lowering the first sense mass and the second sense mass in the vertical dimension above the support structure.

22. The method of claim 20, wherein oscillating the first sense mass in the first degree of freedom and oscillating the second sense mass mechanically coupled to the first sense mass in the second degree of freedom further comprises:

oscillating the first sense mass in vertical torsional rotation about the central anchoring structure.

23. An inertial device having multiple degrees of freedom for determining an inertial parameter, the inertial device comprising:

a first sense mass with a first degree of freedom;

a second sense mass mechanically coupled to the first sense mass and with a second degree of freedom;

a first time domain switch coupled to the first sense mass, and a second time domain switch coupled to the second sense mass;

a drive structure configured to oscillate the first sense mass and the second sense mass in a differential frequency mode, wherein the first time domain switch and the second time domain switch each produce an electrical signal in response to oscillations of the first sense mass and the second sense mass; and

a processor in signal communication with the first time domain switch and the second time domain switch, and configured to determine an inertial parameter based in part on time intervals produced by the electrical signal.

24. The inertial device of claim 23, wherein as the first sense mass and the second sense mass oscillate in the differential frequency mode, the first time domain switch and the second time domain switch produce a differential signal.

25. The inertial device of claim 24, the inertial device further comprising:

coupling springs mechanically coupled to the first sense mass and to the second sense mass;

anchoring springs independently mechanically coupled to each of the first sense mass and the second sense mass and a central anchoring structure, and wherein the central anchoring structure is rigidly coupled to a support structure.

26. The inertial device of claim 25, wherein the inertial parameter is determined using a spring constant of the respective anchoring springs and a spring constant of the coupling springs to reduce the frequency of the differential frequency mode.

27. The inertial device of claim 26, wherein a common mode frequency component of the electrical signal produced by the first time domain switch and the second time domain switch is substantially eliminated from the differential signal.

28. The inertial device of claim 27, wherein the first degree of freedom and the second degree of freedom are in a horizontal dimension.

29. The inertial device of claim 28, wherein the inertial parameter is acceleration in the horizontal dimension.

30. The inertial device of claim 29, wherein the first sense mass is mechanically coupled to the second sense mass with a frame, and wherein the frame oscillates in differential motion with the first sense mass and the second sense mass in-plane with the horizontal dimension.

31. The inertial device of claim 30, wherein the first time domain switch comprises a first set of capacitive teeth that produce a first capacitive current, and the second time domain switch comprises a second set of capacitive teeth that produce a second capacitive current, and wherein the first capacitive current is out of phase with the second capacitive current.

32. The inertial device of claim 31, wherein the differential signal is a linear combination of the first capacitive current and the second capacitive current.

33. A method of determining an inertial parameter using multiple degrees of freedom, the method comprising:

oscillating a first sense mass in a first degree of freedom;

oscillating a second sense mass mechanically coupled to the first sense mass and with a second degree of freedom;

coupling a first time domain switch to the first sense mass, and a second time domain switch to the second sense mass;

producing an electrical signal in response to oscillations of the first sense mass and the second sense mass from each of the first time domain switch and the second time domain switch, and wherein a drive structure oscillates the first sense mass and the second sense mass at a differential frequency mode; and

determining an inertial parameter based in part on time intervals produced by the electrical signal.

34. The method of claim 33, further comprising producing a differential signal from the first sense mass and the second sense mass as the first sense mass and the second sense mass oscillate in the differential frequency mode.

35. The method of claim 34, further comprising:

mechanically coupling the first sense mass to the second sense mass with coupling springs;

mechanically coupling each of the first sense mass and the second sense mass to a central anchoring structure with anchoring springs, and wherein the central anchoring structure is rigidly coupled to a support structure.

36. The method of claim 35, further comprising determining the inertial parameter using a spring constant of the respective anchoring springs and a spring constant of the coupling springs and reducing the frequency of the differential frequency mode.

37. The method of claim 36, further comprising eliminating a common mode frequency component of the electrical signal produced by the first time domain switch and the second time domain switch from the differential signal.

38. The method of claim 37, wherein oscillating the first sense mass in the first degree of freedom and oscillating the second sense mass mechanically coupled to the first sense mass in the second degree of freedom further comprises:

wherein the first degree of freedom and the second degree of freedom are in a horizontal dimension.

39. The method of claim 38, wherein determining the inertial parameter based in part on time intervals produced by the electrical signal further comprises wherein the inertial parameter is acceleration in the horizontal dimension.

40. The method of claim 39, further comprising:

mechanically coupling the first sense mass to the second sense mass with a frame, and wherein the frame oscillates in differential motion with the first sense mass and the second sense mass in-plane with the horizontal dimension.

41. The method of claim 40, further comprising:

producing a first capacitive current from the first time domain switch comprising a first set of capacitive teeth;

producing a second capacitive current from the second time domain switch comprising a second set of capacitive teeth; and

wherein the first capacitive current is out of phase with the second capacitive current.

42. The method of claim 41, wherein determining the inertial parameter based in part on time intervals produced by the electrical signal further comprises:

determining a linear combination of the first capacitive current and the second capacitive current.