MEMS SWITCH
First Claim
Patent Images
1. A MEMS component, comprising:
- a substrate;
a support;
a movable structure connected to the support and extending in a first direction and having a free end delimited by an edge and having a contact carrier extending therefrom;
a control electrode;
wherein;
the support extends from the substrate and holds a portion of the movable structure adjacent the substrate;
the movable structure overlaps with the control electrode;
the control electrode extends past the edge of the movable structure in the first direction except in a region of a contact carrier portion of the movable structure;
a spatial extent of the control electrode in a second direction is greater than the spatial extent of the movable structure in the second direction, and the control electrode is configured to shield the movable structure from charge that gets trapped in the substrate such that the movable structure returns without delay to a rest position when a control voltage which has been applied for more than a day is removed.
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Abstract
Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
2 Citations
23 Claims
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1. A MEMS component, comprising:
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a substrate; a support; a movable structure connected to the support and extending in a first direction and having a free end delimited by an edge and having a contact carrier extending therefrom; a control electrode; wherein;
the support extends from the substrate and holds a portion of the movable structure adjacent the substrate;
the movable structure overlaps with the control electrode;
the control electrode extends past the edge of the movable structure in the first direction except in a region of a contact carrier portion of the movable structure;
a spatial extent of the control electrode in a second direction is greater than the spatial extent of the movable structure in the second direction, and the control electrode is configured to shield the movable structure from charge that gets trapped in the substrate such that the movable structure returns without delay to a rest position when a control voltage which has been applied for more than a day is removed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A MEMS component, comprising:
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a substrate; a support; a movable structure connected to the support and extending in a first direction and having a free end delimited by an edge control electrode; wherein;
the support extends from the substrate and holds a portion of the movable structure adjacent the substrate;
the movable structure overlaps with the control electrode;
the control electrode extends past the edge of the movable structure in the first direction;
a spatial extent of the control electrode in a second direction perpendicular to the first direction is greater than the spatial extent of the movable structure in the second direction, and wherein a depending contact if formed on the movable structure between the support and the free end, and the depending contact aligns with a drain or source contact that is formed within, but separated from, the control electrode.
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23. A MEMS component, comprising:
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a substrate; a support; a movable structure connected to the support and extending in a first direction and having a free end delimited by an edge and having a contact carrier extending therefrom; a control electrode; wherein;
the support extends from the substrate and holds a portion of the movable structure adjacent the substrate;
the movable structure overlaps with the control electrode;
the control electrode extends past the edge of the movable structure in the first direction except in a region of a contact carrier portion of the movable structure;
a spatial extent of the control electrode in a second direction is greater than the spatial extent of the movable structure in the second direction, and the control electrode is configured to shield the movable structure from charge that gets trapped in the substrate such that the movable structure returns when a control voltage is removed and, wherein;the substrate has a first coefficient of thermal expansion; the support has a second coefficient of thermal expansion;
the MEMS component further comprising an expansion modification structure at or adjacent an interface between the substrate and the support, and having a third coefficient of expansion greater than the first coefficient of expansion, and arranged to exert a thermal expansion force on the substrate in the vicinity of the interface so as to simulate a fourth coefficient of expansion different from the first coefficient in the substrate in the vicinity of the interface.
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Specification