ALUMINA SINTERED BODY AND BASE SUBSTRATE FOR OPTICAL DEVICE
First Claim
1. An alumina sintered body comprising:
- a surface having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained through X-ray irradiation at 2θ
=20°
to 70°
,wherein the alumina sintered body contains Mg and F, a Mg/F mass ratio is 0.05 to 3500, and a Mg content is 30 to 3500 ppm by mass,the alumina sintered body has a crystal grain size of 15 to 200 μ
m,when a field of view of 370.0 μ
m long×
372.0 μ
m wide is photographed with a 1000-fold magnification and the photograph is visually observed, a number of pores having a diameter of 0.2 to 0.6 μ
m is 250 or less, anda volume fraction of the pores having a diameter of 0.2 to 0.6 μ
m to the alumina sintered body is 130 ppm by volume or less.
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Abstract
An alumina sintered body according to the present invention includes a surface having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained through X-ray irradiation at 2θ=20° to 70°. The alumina sintered body contains Mg and F, a Mg/F mass ratio is 0.05 to 3500, and a Mg content is 30 to 3500 ppm by mass. The alumina sintered body has a crystal grain size of 15 to 200 μm. When a field of view of 370.0 μm long×372.0 μm wide is photographed with a 1000-fold magnification and the photograph is visually observed, a number of pores having a diameter of 0.2 to 0.6 μm is 250 or less.
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Citations
11 Claims
-
1. An alumina sintered body comprising:
-
a surface having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained through X-ray irradiation at 2θ
=20°
to 70°
,wherein the alumina sintered body contains Mg and F, a Mg/F mass ratio is 0.05 to 3500, and a Mg content is 30 to 3500 ppm by mass, the alumina sintered body has a crystal grain size of 15 to 200 μ
m,when a field of view of 370.0 μ
m long×
372.0 μ
m wide is photographed with a 1000-fold magnification and the photograph is visually observed, a number of pores having a diameter of 0.2 to 0.6 μ
m is 250 or less, anda volume fraction of the pores having a diameter of 0.2 to 0.6 μ
m to the alumina sintered body is 130 ppm by volume or less. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification