BIPOLAR ELECTROSTATIC CHUCK AND METHOD FOR USING THE SAME
First Claim
1. An electrostatic chuck comprising:
- a chuck body; and
a plurality of independently replaceable electrostatic chuck assemblies mounted in an array across the chuck body to define a substrate support surface suitable for supporting a large area substrate, at least a first electrostatic chuck assembly of the plurality of electrostatic chuck assemblies operable independent of an operation of a second electrostatic chuck assembly of the plurality of electrostatic chuck assemblies.
2 Assignments
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Accused Products
Abstract
Described herein are an electrostatic chuck and method for using the same. In one example, an electrostatic chuck is provided that includes a plurality of independently replaceable electrostatic chuck assemblies mounted in an array across a chuck body. The electrostatic chuck assemblies define a substrate support surface suitable for supporting a large area substrate. At least a first electrostatic chuck assembly of the plurality of electrostatic chuck assemblies is operable independent of an operation of a second electrostatic chuck assembly of the plurality of electrostatic chuck assemblies. In yet another example, a method for chucking a substrate is provided.
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Citations
20 Claims
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1. An electrostatic chuck comprising:
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a chuck body; and a plurality of independently replaceable electrostatic chuck assemblies mounted in an array across the chuck body to define a substrate support surface suitable for supporting a large area substrate, at least a first electrostatic chuck assembly of the plurality of electrostatic chuck assemblies operable independent of an operation of a second electrostatic chuck assembly of the plurality of electrostatic chuck assemblies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for chucking a substrate, comprising:
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disposing a large area substrate against a substrate support surface of an electrostatic chuck comprising a plurality of independently replaceable independently energizable bi-polar electrostatic chuck assemblies; energizing at least a first group of the bi-polar electrostatic chuck assemblies to secure the substrate to the substrate support surface; providing a backside gas between the substrate and the substrate support surface; and applying pressure below a seal secured in a cantilevered orientation and circumscribing the bi-polar electrostatic chuck assemblies, the pressure flexing the seal into contact with the substrate. - View Dependent Claims (18, 19, 20)
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Specification