OFFLINE VISION ASSIST METHOD AND APPARATUS FOR INTEGRATED CIRCUIT DEVICE VISION ALIGNMENT

• US 20180059176A1
• Filed: 08/25/2017
• Published: 03/01/2018
• Est. Priority Date: 08/26/2016
• Status: Abandoned Application

• Current Assignee: Delta Design Incorporated (COHU Incorporated)
• Original Assignee: Delta Design Incorporated (COHU Incorporated)
• Inventors: Ding, Kexiang Ken, Laver, Michael Anthony
• Application Number:
  US15/686,964
• Publication Number:
  US 20180059176A1
• Time in Patent Office: Days
• CPC Class Codes: G01R 1/0433 Sockets for IC's or transistors
• CPC Class Codes: G01R 1/0483 Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips for IC's with connecting points around the edges only G01R1/0433
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

An offline vision assisted calibration system includes: a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises: a socket plate that comprises a hole grid array; and a top contactor assembly that is mountable in an integrated circuit device handler and comprises: a guide plate, a plurality of fiducials located on a lower side surface of the guide plate, a contact holder plate comprising a top contactor contact array, and a plurality of adjustment actuators configured to move the contact holder plate with respect to the guide plate; and a calibration jig comprising an array of contacts on a bottom side thereof, wherein the calibration jig is configured to be placed in the socket plate such that the contacts engage with the hole grid array of the socket plate.

Claims

1. An offline vision assisted calibration system comprising:

a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises;

a socket plate that comprises a hole grid array; and

a top contactor assembly that is mountable in an integrated circuit device handler and comprises;

a guide plate,

a plurality of fiducials located on a lower side surface of the guide plate,

a contact holder plate comprising a top contactor contact array, and

a plurality of adjustment actuators configured to move the contact holder plate with respect to the guide plate;

a calibration jig comprising an array of contacts on a bottom side thereof, wherein the calibration jig is configured to be placed in the socket plate such that the contacts engage with the hole grid array of the socket plate;

a bottom side socket assembly holder configured to hold the bottom side socket assembly; and

a top contactor assembly holder configured to hold the top contactor assembly.

2. The system of claim 1, wherein:

one of the bottom side socket assembly or the top contactor assembly comprises a plurality of alignment pins; and

the other of the bottom side socket assembly or the top contactor assembly comprises a plurality of bushings configured to engage with the alignment pins of the bottom side socket assembly.

3. The system of claim 2, wherein:

the bottom side socket assembly further comprises a plurality of alignment pins located on an upper side surface of the socket plate; and

the top contactor assembly further comprises a plurality of bushings located on a lower side surface of the guide plate, the bushings being configured to engage with the alignment pins of the bottom side socket assembly.

4. The system of claim 2, wherein:

the top contactor assembly further comprises a plurality of alignment pins located on a lower side surface of the guide plate; and

the bottom side socket assembly further comprises a plurality of bushings located on an upper side surface of the socket plate, the bushings being configured to engage with the alignment pins of the top contactor assembly.

5. The system of claim 2, further comprising:

an upward facing camera; and

a controller configured to;

while the calibration jig is in the socket plate, cause the top contactor assembly holder to move the top contactor assembly to a position at which the alignment pins are engaged with the bushings,

while the alignment pins are engaged with the bushings, cause the top contactor assembly holder to pick up the calibration jig from the bottom side socket assembly and move the calibration jig to a location above the upward-facing camera,

receive, from the upward-facing camera, an image of a bottom side of the top contactor assembly and calibration jig, and

determine, based on the received image, a first offset between the array of contacts of the calibration jig and the fiducials of the top contactor assembly, the first offset being representative of an offset between the hole grid array of the bottom side socket assembly and the fiducials of the top contactor assembly.

6. The system of claim 5, wherein:

the controller is further configured to;

receive, from the upward-facing camera, an image of the bottom side of the top contactor assembly without the calibration jig,

determine a second offset between the top contactor contact array and the fiducials of the top contactor assembly, and

determine a third offset between the top contactor contact array and the hole grid array by calculating a difference between the first offset and the second offset.

7. The system of claim 1, wherein the hole grid array comprises a plurality of holes, each of which contains a moveable pogo pin.

8. The system of claim 2, wherein:

the plurality of bushings comprises a first bushing and a second bushing;

the first bushing comprises a half-circular solid piece and a first plurality of spring loaded fingers configured to reference a respective alignment pin toward the half-circular solid piece; and

the second bushing comprises a half-oval solid piece and a second plurality of spring loaded fingers configured to reference a respective alignment pin toward the half-oval solid piece.

9. The system of claim 1, wherein:

the plurality of adjustment actuators comprises;

a first adjustment actuator and a second adjustment actuator located at two positions along a first side of the contact holder plate and configured to move the contact holder plate with respect to the guide plate in an X-direction, and

a second adjustment actuator located at a position along a second side of the contact holder plate, perpendicular to the first side, and configured to move the contact holder plate with respect to the guide plate in a Y-direction; and

the first, second, and third adjustment actuators are further configured to adjust an angular position of the contact holder plate with respect to the guide plate.

10. The system of claim 9, wherein:

the top contactor assembly first comprises;

a first spring located opposite the first actuator and configured to bias the contact holder plate toward the first actuator,

a second spring located opposite the second actuator and configured to bias the contact holder plate toward the second actuator, and

a third spring located opposite the third actuator and configured to bias the contact holder plate toward the third actuator.

11. The system of claim 1, wherein the top contactor contact array is a pogo array comprising a plurality of holes, each of which contains a pogo pin.

12. The system of claim 8, wherein the contact holder plate further comprises an additional set of holes located inside or outside of the pogo array when viewed from below the contact holder plate, and the holes in the additional set of holes do not contain pogo pins.

13. A method of performing offline vision assisted calibration, the method comprising:

providing an offline vision assisted calibration system comprising;

a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises;

a socket plate that comprises a hole grid array.

a top contactor assembly that is mountable in an integrated circuit device handler and comprises;

a guide plate,

a plurality of fiducials located on the lower side surface of the guide plate,

a contact holder plate comprising a top contactor contact array, and

a plurality of adjustment actuators configured to move the contact holder plate with respect to the guide plate,

a calibration jig comprising an array of contacts on a bottom side thereof, wherein the calibration jig is configured to be placed in the socket plate such that the contacts engage with the hole grid array of the socket plate,

a bottom side socket assembly holder configured to hold the bottom side socket assembly,

a top contactor assembly holder configured to hold the top contactor assembly, and

an upward-facing camera,

wherein one of the bottom side socket assembly or the top contactor assembly comprises a plurality of alignment pins, and the other of the bottom side socket assembly or the top contactor assembly comprises a plurality of bushings configured to engage with the alignment pins of the bottom side socket assembly;

while the calibration jig is in the socket plate, causing the top contactor assembly holder to move the top contactor assembly to a position at which the alignment pins are engaged with the bushings;

while the alignment pins are engaged with the bushings, causing the top contactor assembly holder to pick up the calibration jig from the bottom side socket assembly and move the calibration jig to a location above the upward-facing camera;

receiving, from the upward-facing camera, an image of a bottom side of the top contactor assembly and calibration jig; and

determining, based on the received image;

a first offset between the array of contacts of the calibration jig and the fiducials of the top contactor assembly, the first offset being representative of an offset between the hole grid array of the bottom side socket assembly and the fiducials of the top contactor assembly.

14. The method of claim 13, further comprising:

receiving, from the upward-facing camera, an image of the bottom side of the top contactor assembly without the calibration jig;

determining a second offset between the top contactor contact array and the fiducials of the top contactor assembly; and

determining a third offset between the top contactor contact array and the hole grid array by calculating a difference between the first offset and the second offset.

15. The method of claim 13, wherein:

the plurality of bushings comprises a first bushing and a second bushing;

the first bushing comprises a half-circular solid piece and a first plurality of spring loaded fingers configured to reference a respective alignment pin toward the half-circular solid piece; and

the second bushing comprises a half-oval solid piece and a second plurality of spring loaded fingers configured to reference a respective alignment pin toward the half-oval solid piece.

16. A system for performing offline vision alignment between a socket and a contactor, the system comprising:

a bottom side socket assembly holder configured to hold a bottom side sock assembly having a hole grid array;

a calibration jig comprising an array of jig contacts at its bottom surface, the jig contacts being configured to engage with holes of the hole grid array;

a top contactor assembly holder configured to hold a top contactor assembly having an array of contactor contacts and a plurality of fiducials, and configured to cause the top contactor assembly to pick up the calibration jig from the bottom side socket assembly;

an upward-looking camera; and

a controller configured to;

receive data from the upward-looking camera,

determine a locational offset between the hole grid array and the contactor fiducials based on an image taken by the upward-looking camera of the top contactor assembly holding the calibration jig,

determine a locational offset between the contactor contacts and the contactor fiducials based on an image taken by the upward-looking camera of the top contactor assembly without the calibration jig, and

determine a locational offset between the contactor contacts and the socket hole grid array based on a difference between (i) the determined locational offset between the hole grid array and the contactor fiducials and (ii) the determined locational offset between the contactor contacts and the contactor fiducials.