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GENERATING METHOD OF DRAWING DATA AND CHARGED PARTICLE BEAM DRAWING METHOD

  • US 20180060474A1
  • Filed: 08/31/2017
  • Published: 03/01/2018
  • Est. Priority Date: 09/01/2016
  • Status: Active Grant
First Claim
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1. A generating method of drawing data, the method comprising:

  • generating a pixel map that includes dose amount information on each of pixels obtained by dividing a drawing area on an object into a mesh, the object being a target on which drawing is performed by a charged particle beam drawing apparatus;

    extracting, from the pixel map, an island-shaped pixel map which is a group of multiple pixels in which the dose amount information is not zero;

    determining an order of definition of the dose amount information on the pixels in the island-shaped pixel map; and

    generating a compressed pixel map including a size of the pixels, information indicating the order of definition, coordinates of a pixel which is first in the order of definition in the island-shaped pixel map, and the dose amount information on the pixels in the island-shaped pixel map, the dose amount information being continuously defined based on the order of definition.

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