VERTICAL FUSE STRUCTURES

• US 20180061757A1
• Filed: 08/25/2016
• Published: 03/01/2018
• Est. Priority Date: 08/25/2016
• Status: Active Grant

• Current Assignee: Elpis Technologies Inc. (Wi-LAN Inc.)
• Original Assignee: International Business Machines Corporation
• Inventors: Li, Juntao, Wang, Junli, Yang, Chih-Chao
• Granted Patent: US 9,929,091 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/823431 with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 27/0617 comprising components of the field-effect type H01L27/0251 takes precedence
• CPC Class Codes: H01L 27/0886 including transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 29/66545 using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
• CPC Class Codes: H01L 29/785 having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET

Abstract

Semiconductor devices and methods are provided in which vertical fuse devices are integrally formed with FINFET (Fin Field Effect Transistor) devices, wherein the vertical fuse devices are formed as part of a process flow for fabricating the FINFET devices. For example, a semiconductor device comprises first and second vertical semiconductor fins, a vertical fuse device, and a FINFET device. The vertical fuse device comprises a metal fuse element formed over a portion of the first vertical semiconductor fin, and the FINFET device comprises a metal gate electrode formed over a portion of the second vertical semiconductor fin. The metal fuse element and the metal gate electrode are concurrently formed as part of a replacement metal gate process flow.

Claims

1. A method for fabricating a semiconductor device, comprising:

forming a plurality of vertical semiconductor fins on a semiconductor substrate, the plurality of vertical semiconductor fins comprising a first vertical semiconductor fin and a second vertical semiconductor fin;

forming a vertical fuse device having a first dummy gate structure formed over a portion of the first vertical semiconductor fin;

forming a FINFET (Fin Field Effect Transistor) device having a second dummy gate structure formed over a portion of the second vertical semiconductor fin; and

performing a RMG (replacement metal gate) process to remove the first and second dummy gate structures, and to replace the first dummy gate structure with a metal fuse element for the vertical fuse device and replace the second dummy gate structure with a metal gate electrode for the FINFET device, wherein performing the RMG process comprises;

removing the first dummy gate structure to form a first recess between insulating sidewall spacers of the vertical fuse device;

removing the second dummy gate structure to form a second recess between insulating sidewall spacers of the FINFET device;

forming a conformal gate dielectric layer on exposed surfaces of the second vertical semiconductor fin in the second recess;

forming a conformal work function metal layer on exposed surfaces of the first vertical semiconductor fin in the first recess and on the conformal gate dielectric layer formed on the exposed surfaces of the second vertical semiconductor fin in the second recess; and

depositing a layer of metallic material in the first and second recesses to form a metallic fuse electrode in contact with the conformal work function metal layer in the first recess and to form a metallic gate electrode in contact with the conformal work function metal layer in the second recess.

2. The method of claim 1, further comprising:

forming a first fuse contact in contact with the metal fuse element of the vertical fuse device; and

forming a second fuse contact in contact with a portion of the first vertical semiconductor fin adjacent to the vertical fuse device.

4. The method of claim 1, wherein the metallic fuse electrode and the conformal work function metal layer in the first recess form the metal fuse element of the vertical fuse device;

and

wherein the metallic gate electrode, the conformal work function metal layer, and the conformal gate dielectric layer in the second recess form the metal gate electrode of the FINFET device.

5. The method of claim 1, further comprising depositing a layer of insulating material to form a first capping layer over the metal fuse element of the vertical fuse device and to form a second capping layer over the metal gate electrode of the FINFET device.

6. The method of claim 1, wherein the conformal work function metal comprises at least one of TaN, TiN, and TiAlC.

7. The method of claim 1, wherein the conformal gate dielectric layer comprises a high-k dielectric material having a dielectric constant k of about 3.0 or greater.

8. The method of claim 1, wherein the layer of metallic material deposited in the first and second recesses comprises at least one of Al, W, Co and a metal silicide.

9. The method of claim 1, wherein forming a conformal gate dielectric layer on exposed surfaces of the second vertical semiconductor fin in the second recess comprises:

depositing a conformal layer of dielectric material in the first and second recesses;

depositing a conformal protective capping layer over the conformal layer of dielectric material;

forming an etch mask to cover portions of the conformal protective capping layer and the conformal layer of dielectric material in the second recess;

performing an etch process to remove exposed portions of the conformal protective capping layer and the conformal layer of dielectric material in the first recess;

removing the etch mask to expose remaining portions of the conformal protective capping layer and the conformal layer of dielectric material in the second recess; and

etching the remaining portion of the conformal protective capping layer after removing the etch mask.

3. (canceled)

10. A method for fabricating a semiconductor device, comprising:

forming a plurality of vertical semiconductor fins on a semiconductor substrate, the plurality of vertical semiconductor fins comprising a first vertical semiconductor fin and a second vertical semiconductor fin;

forming a vertical fuse device having a first dummy gate structure formed over a portion of the first vertical semiconductor fin;

forming a FINFET (Fin Field Effect Transistor) device having a second dummy gate structure formed over a portion of the second vertical semiconductor fin; and

performing a RMG (replacement metal gate) process to remove the first and second dummy gate structures, and to replace the first dummy gate structure with a metal fuse element for the vertical fuse device and replace the second dummy gate structure with a metal gate electrode for the FINFET device;

wherein the first and second dummy gate structures each comprise a dummy gate oxide layer formed on the respective portions of the first and second vertical semiconductor fins, and a dummy gate polysilicon layer;

wherein performing the RMG process to remove the first and second dummy gate structures comprises;

etching the dummy gate polysilicon layer selective to the dummy gate oxide layer; and

etching the dummy gate oxide layer selective to first and second vertical semiconductor fins.

11. ˜

20. (canceled)