SUCTION EQUIPMENT

• US 20180065257A1
• Filed: 02/29/2016
• Published: 03/08/2018
• Est. Priority Date: 03/03/2015
• Status: Active Grant

• Current Assignee: Harmotec Co., Ltd.
• Original Assignee: Harmotec Co., Ltd.
• Inventors: IWASAKA, Hitoshi, TOKUNAGA, Hideyuki, KASAI, Yuji
• Granted Patent: US 10,189,166 B2
• Time in Patent Office: Days
• CPC Class Codes: B25J 15/0683 Details of suction cup structure, e.g. grooves or ridges
• CPC Class Codes: B65G 2201/022 Flat
• CPC Class Codes: B65G 2249/045 Details of suction cups suction cups
• CPC Class Codes: B65G 49/061 Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames suction means as load-engaging elements attached to the lifting or lowering gear of cranes B66C1/02; suction cups for attaching purposes F16B47/00; suction cups on gripping heads B25J15/0616; suction cups in general B65G47/91; suction cups combined with cutting means on vertical conveyors C03B33/00 - C03B33/10; devices for turning sheets B65G49/067; suspending devices B65G49/066
• CPC Class Codes: H01L 21/67086 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: H01L 21/67712 the substrate being handled substantially vertically
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices

Abstract

Suction equipment is provided with a swirl flow-forming body, a baffle plate, and connecting members that connect swirl flow-forming body and baffle plate. Baffle plate obstructs a member to which suction is applied from entering a concave part provided in swirl flow-forming body. Connecting members form, between end face and baffle plate, a flow path for fluid to flow out of concave part.

Claims

1. Suction equipment, comprising:

a columnar main body;

a flat end face formed at the main body;

a concave part formed at the end face;

a fluid flow-forming means for forming a fluid swirl flow in the concave part or forming a radial flow by discharging fluid into the concave part, the fluid swirl flow or the radial flow generating negative pressure that applies suction to a member;

a baffle plate that allows a fluid to which suction is applied due to the negative pressure pass through while preventing the member from entering the concave part, and

one or more support members that support the baffle plate so that the baffle plate opposes the concave part, and that form, between the end face and the baffle plate, a flow path for fluid to flow out of the concave part.

2. The suction equipment according to claim 1, wherein:

the one or more support members project from the end face and connect the main body and the baffle plate; and

the one or more support members are arranged such that the one or more support members do not obstruct the flow path.

3. The suction equipment according to claim 1, wherein the one or more support members connect a bottom surface of the concave part and the baffle plate.

4. The suction equipment according to claim 1, wherein the baffle plate comprises a concave part or an opening into which a part of the member enters so that a position of the member is determined.

5. The suction equipment according to claim 1, wherein the one or more support members support the baffle plate so that the baffle plate opposes the concave part and the end face, and form the flow path in a space between the end face and the baffle plate.

6. The suction equipment according to claim 2, wherein all of the one or more support members provided in the suction equipment are arranged in positions such that none of the one or more support members obstructs the flow path.

7. The suction equipment according to claim 1, wherein the baffle plate comprises a mesh part having a concave part in the centre.