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SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF A NUMBER OF MIRRORS OF A LITHOGRAPHY SYSTEM

  • US 20180067399A1
  • Filed: 11/08/2017
  • Published: 03/08/2018
  • Est. Priority Date: 05/18/2015
  • Status: Active Grant
First Claim
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1. A sensor arrangement configured to ascertain a respective position of a number of mirrors of a lithography apparatus, the sensor arrangement comprising:

  • a number of position sensor apparatuses, each position sensor apparatus comprising;

    a measuring unit to provide an optical position signal of a position of a mirror in the case of exposure by a light beam;

    a light source to expose the measuring unit to the light beam;

    a detection unit comprising a plurality of photodetectors to output an analog electrical position signal by detecting the provided optical position signal; and

    a signal-processing unit comprising an A/D converter to convert the analog electrical position signal into a digital electrical position signal, the light source and the signal-processing unit being provided in an integrated component arranged in a vacuum housing; and

    an evaluation apparatus to ascertain the position of the mirror via the digital electrical position signal.

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