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SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF A NUMBER OF MIRRORS OF A LITHOGRAPHY SYSTEM

  • US 20180067400A1
  • Filed: 11/09/2017
  • Published: 03/08/2018
  • Est. Priority Date: 05/18/2015
  • Status: Active Grant
First Claim
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1. A sensor arrangement, comprising:

  • a number of position sensor apparatuses, each position sensor apparatus comprising;

    a measuring unit;

    a light source to expose the measuring unit to a modulated light beam so that the measuring unit provides an optical position signal of a position of a mirror of a lithography apparatus during exposure by the modulated light beam; and

    a detection unit comprising a plurality of photodetectors to output an electrical position signal by detection of the provided optical position signal; and

    an evaluation apparatus configured to ascertain the position of the mirror via the electrical position signal,wherein;

    the measuring unit comprises;

    a reference pattern to influence the light beam; and

    a mirror arrangement for reflecting the influenced light beam;

    the evaluation apparatus comprises a signal-processing unit comprising at least one A/D converter to convert an analog electrical position sensor output by the photodetector into a digital electrical position signal; and

    the light source and the signal-processing unit are disposed in an integrated component arranged in a vacuum housing.

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