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COUPLING MECHANISM, SUBSTRATE POLISHING APPARATUS, METHOD OF DETERMINING POSITION OF ROTATIONAL CENTER OF COUPLING MECHANISM, PROGRAM OF DETERMINING POSITION OF ROTATIONAL CENTER OF COUPLING MECHANISM, METHOD OF DETERMINING MAXIMUM PRESSING LOAD OF ROTATING BODY, AND PROGRAM OF DETERMINING MAXIMUM PRESSING LOAD OF ROTATING BODY

  • US 20180071885A1
  • Filed: 11/16/2017
  • Published: 03/15/2018
  • Est. Priority Date: 01/30/2015
  • Status: Active Grant
First Claim
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1. A coupling mechanism for tiltably coupling a rotating body to a drive shaft, comprising:

  • a damping member disposed between the drive shaft and the rotating body,wherein the damping member is attached to both a lower end of the drive shaft and the rotating body, andthe damping member has a Young'"'"'s modulus which is equal to or lower than a Young'"'"'s modulus of the drive shaft, or has a damping coefficient which is higher than a damping coefficient of the drive shaft.

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