SAMPLE SHAPE MEASURING METHOD AND SAMPLE SHAPE MEASURING APPARATUS
First Claim
1. A sample shape measuring method comprising:
- a step of preparing illumination light passing through a predetermined illumination region;
a step of applying the illumination light to a sample; and
a predetermined processing step, whereinthe predetermined illumination region is set so as not to include an optical axis at a pupil position of an illumination optical system and is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil at a pupil position of an observation optical system,the illumination light is transmitted through the sample,light emitted from the sample is incident on the observation optical system, andthe predetermined processing step includes;
a step of receiving light emitted from the observation optical system;
a step of obtaining a quantity of light of the received light;
a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light; and
a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.
2 Assignments
0 Petitions
Accused Products
Abstract
A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.
10 Citations
41 Claims
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1. A sample shape measuring method comprising:
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a step of preparing illumination light passing through a predetermined illumination region; a step of applying the illumination light to a sample; and a predetermined processing step, wherein the predetermined illumination region is set so as not to include an optical axis at a pupil position of an illumination optical system and is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil at a pupil position of an observation optical system, the illumination light is transmitted through the sample, light emitted from the sample is incident on the observation optical system, and the predetermined processing step includes; a step of receiving light emitted from the observation optical system; a step of obtaining a quantity of light of the received light; a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light; and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A sample shape measuring apparatus comprising:
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an illumination optical system; an observation optical system; a holding member; a detecting element; and a processing apparatus, wherein the illumination optical system includes a light source, a condenser lens, and an aperture member, the observation optical system includes an objective lens and an imaging lens, the holding member holds a sample and is disposed between the illumination optical system and the observation optical system, illumination light applied to the sample by the illumination optical system is transmitted through the sample, light emitted from the sample is incident on the observation optical system, the detecting element receives light emitted from the observation optical system, and the processing apparatus obtains a quantity of light based on the received light, calculates a difference or a ratio between the quantity of light and a reference quantity of light, and calculates an amount of tilt in a surface of the sample based on the difference or the ratio. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A sample shape measuring apparatus comprising:
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an illumination optical system; an observation optical system; a holding member; a detecting element; and a processing apparatus, wherein the illumination optical system includes alight source, a condenser lens, and an aperture member, the observation optical system includes an objective lens and an imaging lens, the holding member holds a sample and is disposed between the illumination optical system and the observation optical system, the aperture member has a light-shielding part and an opening, the light-shielding part is provided so as to include an optical axis of the condenser lens, the opening is provided at a position eccentric with respect to the optical axis, an image of the opening is formed in vicinity of a pupil position of the observation optical system and is formed so as to overlap part of an outer edge of a pupil of the observation optical system, illumination light applied to the sample by the illumination optical system is transmitted through the sample, light emitted from the sample is incident on the observation optical system, the detecting element receives light emitted from the observation optical system, and the processing apparatus obtains a quantity of light based on the received light, calculates a difference or a ratio between the quantity of light and a reference quantity of light, and calculates an amount of tilt in a surface of the sample from the difference or the ratio. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification