CONFIGURATION TO REDUCE NON-LINEAR MOTION

• US 20180073875A1
• Filed: 11/15/2017
• Published: 03/15/2018
• Est. Priority Date: 01/21/2014
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: ANAC, Ozan, SEEGER, Joseph
• Granted Patent: US 10,527,421 B2
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G01C 19/5733 Structural details or topology
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01P 15/0802 Details

Abstract

Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2^nd harmonic motion is minimized.

Claims

1. A Micro-Electro-Mechanical Systems (MEMS) sensor comprising;

first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation;

a first travelling system comprising a first travelling mass and a first proof mass coupled to each other;

a second travelling system comprising a second travelling mass and a second proof mass coupled to each other;

a plurality of actuators for driving the first travelling system and the second travelling system into oscillation in a first direction and causing the first and second rotating arms to counter rotate in a plane that includes the first direction;

wherein the first travelling system is coupled to the first rotating arm by a first flexible element system and the second travelling system is coupled to the second rotating arm by a second flexible element system, and wherein the first travelling mass is coupled to the second travelling mass by a third flexible element system;

a plurality of transducers associated with the first travelling system and configured to sense a first motion associated with at least a portion of the first travelling system and associated with the second travelling system and configured to sense a second motion associated with at least a portion of the second travelling system;

wherein the first motion and the second motion each comprise a first component of motion in a second direction and a second component of motion in the second direction that is in plane with and orthogonal to the first direction, and wherein the first component of motion comprises Coriolis motion as a result of angular velocity applied to the MEMS sensor orthogonal to the first direction and the second direction and the second component of motion comprises a second harmonic motion; and

wherein the plurality of transducers are electrically coupled such that, for a combination of signals associated with the first motion and the second motion, when combined, signals associated with the second harmonic motion are cancelled from the combination of signals.

2. The MEMS sensor of claim 1, wherein the first travelling system and the second travelling system move in a plane parallel to a substrate.

3. The MEMS sensor of claim 2, wherein the first and second rotating arms are coupled to an anchor system on the substrate by a set of flexible elements.

4. The MEMS sensor of claim 1, wherein the plurality of transducers are further configured to sense the first motion and the second motion associate with at least a portion of each of the first proof mass and the second proof mass.

5. MEMS sensor of claim 1, further comprising:

the first travelling system comprising a first pair of travelling masses and a first pair of proof masses coupled to each other;

the second travelling system comprising a second pair of travelling masses and a second pair of proof masses coupled to each other;

wherein one of the first pair of travelling masses comprising the first travelling mass is coupled to one of the second pair of travelling masses comprising the second travelling mass by the third flexible element system;

wherein ones of the first pair of travelling masses and ones of the first pair of proof masses move in opposite directions that are parallel to the first direction, and wherein ones of the second pair of travelling masses and ones of the second pair of proof masses move in opposite directions that are parallel to the first direction, when driven into oscillation; and

wherein the ones of the first pair of proof masses move in opposite directions that are parallel to a second direction that is orthogonal to the first direction, and wherein ones of the second pair of proof masses move in opposite directions that are parallel to the second direction, when driven into oscillation, and as a result of the angular velocity applied to the MEMS sensor orthogonal to the first direction and the second direction.

6. The MEMS sensor of claim 5, further comprising:

a second plurality of transducers configured to sense motion of at least a portion of at least one of the first pair of proof masses or the second pair of proof masses.

7. The MEMS sensor of claim 6, wherein the second plurality of transducers are configured to sense motion of at least another portion of the first travelling system and the second traveling system in the second direction.

8. The MEMS sensor of claim 6, wherein the second plurality of transducers are further configured to provide a first set of differential signals associated with motion of the first pair of proof masses and are configured to provide a second set of differential signals associated with motion of the second pair of proof masses.

9. The MEMS sensor of claim 8, wherein the first set of differential signals and the second set of differential signals are provided by the second plurality of transducers as a result of motion of the first pair of proof masses and the second pair of proof masses that is parallel to the second direction.

10. The MEMS sensor of claim 6, wherein the at least the portion of each of the first travelling system and the second traveling system are configured to allow out-of-plane rotation of the at least the portion of each of the first travelling system and the second traveling system about a roll axis that is in plane with and orthogonal to the first direction.

11. The MEMS sensor of claim 10, wherein the second plurality of transducers are further configured to sense at least a portion of the out-of-plane rotation of the at least the portion of each of the first travelling system and the second traveling system.

12. The MEMS sensor of claim 10, wherein the third flexible element system is configured to allow the out-of-plane rotation of the at least the portion of each of the first travelling system and the second traveling system.

13. The MEMS sensor of claim 10, wherein the third flexible element system is torsionally compliant about an axis parallel to the first direction to allow the out-of-plane rotation of the at least the portion of each of the first travelling system and the second traveling system to be anti-phase.

14. The MEMS sensor of claim 5, further comprising:

a first pair of transducers configured to sense first differential motion of the ones of the first pair of proof masses; and

a second pair of transducers configured to sense second differential motion of the ones of the second pair of proof masses.

15. The MEMS sensor of claim 14, further comprising:

another set of transducers configured to sense differential rotation associated with the ones of the first pair of travelling masses and the ones of the second pair of travelling masses.

16. The MEMS sensor of claim 1, wherein the plurality of transducers comprises at least a first electrode associated with the first travelling system and configured to sense the first motion associated with the at least the portion of the first travelling system and at least a second electrode associated with the second travelling system and configured to sense the second motion associated with the at least the portion of the second travelling system.

17. The MEMS sensor of claim 1, wherein the plurality of transducers comprise at least one of a capacitive transducer, an optical transducer, or a piezoelectric transducer.

18. The MEMS sensor of claim 1, wherein the first flexible element system, the second flexible element system, and the third flexible element system are configured to allow rotation of the first and second rotating arms in plane with and orthogonal to the first direction.

19. The MEMS sensor of claim 1, wherein the third flexible element system comprises a folded spring.

20. The MEMS sensor of claim 19, wherein the third flexible element system comprises at least the folded spring and at least one of another folded spring, another proof mass, or a rigid coupling element.

21. The MEMS sensor of claim 5, wherein the MEMS sensor is configured to sense force imparted on the first pair of proof masses and the second pair of proof masses in response to the angular velocity applied to the MEMS sensor about a yaw input axis orthogonal to the first direction and the second direction.

22. The MEMS sensor of claim 21, wherein the MEMS sensor is configured to sense rotational force imparted on the first pair of travelling masses and the second pair of travelling masses in response to another angular velocity applied to the MEMS sensor about a roll-input axis that is in plane with and orthogonal to the first direction and the yaw input axis.