MULTIPLE DEGREE OF FREEDOM MEMS SENSOR CHIP AND METHOD FOR FABRICATING THE SAME
First Claim
1. A single Micro-Electro-Mechanical System (MEMS) sensor chip for measuring multiple parameters, referred to as multiple degrees of freedom (DOF), the sensor chip comprising:
- an electrically conductive MEMS wafer having first and second sides and an outer frame;
an electrically conductive top cap wafer having an inner top cap side and an outer top cap side, the inner top cap side being bonded to the first side of the MEMS wafer;
an electrically conductive bottom cap wafer having an inner bottom cap side and an outer bottom cap side, the inner bottom cap side being bonded to the second side of the MEMS wafer,at least one of the outer top cap side and the outer bottom cap side comprising electrical connections;
at least two distinct sensors, each patterned in the electrically conductive MEMS wafer and in at least one of the top and bottom cap wafer, said sensors being operative to sense at least two distinct parameters, respectively, along at least one of mutually orthogonal X, Y and Z axes; and
insulated conducting pathways extending from said electrical connections, through at least one of the electrically conductive top cap and bottom cap wafers, and through the electrically conductive MEMS wafer, to said sensors, for conducting electrical signals between said sensors and the electrical connections, said sensors being enclosed by the electrically conductive top and bottom cap wafers and by the outer frame of the electrically conductive MEMS wafer.
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Accused Products
Abstract
A single Micro-Electro-Mechanical System (MEMS) sensor chip is provided, for measuring multiple parameters, referred to as multiple degrees of freedom (DOF). The sensor chip comprises a central MEMS wafer bonded to a top cap wafer and a bottom cap wafer, all three wafer being electrically conductive. The sensor comprises at least two distinct sensors, each patterned in the electrically conductive MEMS wafer and in at least one of the top and bottom cap wafer. Insulated conducting pathways extend from electrical connections on the top or bottom cap wafers, through at least one of the electrically conductive top cap and bottom cap wafers, and through the electrically conductive MEMS wafer, to the sensors, for conducting electrical signals between the sensors and the electrical connections. The two or more distinct sensors are enclosed by the top and bottom cap wafers and by the outer frame of MEMS wafer.
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Citations
25 Claims
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1. A single Micro-Electro-Mechanical System (MEMS) sensor chip for measuring multiple parameters, referred to as multiple degrees of freedom (DOF), the sensor chip comprising:
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an electrically conductive MEMS wafer having first and second sides and an outer frame; an electrically conductive top cap wafer having an inner top cap side and an outer top cap side, the inner top cap side being bonded to the first side of the MEMS wafer; an electrically conductive bottom cap wafer having an inner bottom cap side and an outer bottom cap side, the inner bottom cap side being bonded to the second side of the MEMS wafer, at least one of the outer top cap side and the outer bottom cap side comprising electrical connections; at least two distinct sensors, each patterned in the electrically conductive MEMS wafer and in at least one of the top and bottom cap wafer, said sensors being operative to sense at least two distinct parameters, respectively, along at least one of mutually orthogonal X, Y and Z axes; and insulated conducting pathways extending from said electrical connections, through at least one of the electrically conductive top cap and bottom cap wafers, and through the electrically conductive MEMS wafer, to said sensors, for conducting electrical signals between said sensors and the electrical connections, said sensors being enclosed by the electrically conductive top and bottom cap wafers and by the outer frame of the electrically conductive MEMS wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification