THICK TUNGSTEN HARDMASK FILMS DEPOSITION ON HIGH COMPRESSIVE/TENSILE BOW WAFERS
First Claim
1. A method of forming a hardmask layer on a substrate comprising:
- applying a chucking voltage to a substrate positioned on an electrostatic chuck in a processing chamber;
forming a seed layer comprising boron on a film stack disposed on the substrate by supplying a seed layer gas mixture in the processing chamber while maintaining the chucking voltage;
forming a transition layer comprising boron and tungsten on the seed layer by supplying a transition layer gas mixture in the processing chamber; and
forming a bulk hardmask layer on the transition layer by supplying a main deposition gas mixture in the processing chamber.
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Accused Products
Abstract
Implementations of the present disclosure generally relate to the fabrication of integrated circuits. More particularly, the implementations described herein provide techniques for deposition of thick hardmask films on a substrate. In one implementation, a method of forming a hardmask layer on a substrate is provided. The method comprises applying a chucking voltage to a substrate positioned on an electrostatic chuck in a processing chamber, forming a seed layer comprising boron on a film stack disposed on a substrate by supplying a seed layer gas mixture in the processing chamber while maintaining the chucking voltage, forming a transition layer comprising boron and tungsten on the seed layer by supplying a transition layer gas mixture in the processing chamber and forming a bulk hardmask layer on the transition layer by supplying a main deposition gas mixture in the processing chamber.
33 Citations
20 Claims
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1. A method of forming a hardmask layer on a substrate comprising:
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applying a chucking voltage to a substrate positioned on an electrostatic chuck in a processing chamber; forming a seed layer comprising boron on a film stack disposed on the substrate by supplying a seed layer gas mixture in the processing chamber while maintaining the chucking voltage; forming a transition layer comprising boron and tungsten on the seed layer by supplying a transition layer gas mixture in the processing chamber; and forming a bulk hardmask layer on the transition layer by supplying a main deposition gas mixture in the processing chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of forming a hardmask layer on a substrate comprising:
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applying a chucking voltage to a substrate positioned on an electrostatic chuck in a processing chamber; forming a seed layer comprising boron on a film stack disposed on the substrate by; supplying a seed layer gas mixture in the processing chamber while maintaining the chucking voltage, wherein the seed layer gas mixture comprises at least a boron-based precursor gas and a nitrogen-based precursor gas; and steadily supplying the nitrogen-based precursor gas and varying the flow of the boron-based precursor gas in the processing chamber to form the seed layer; forming a transition layer comprising boron and tungsten on the seed layer by supplying a transition layer gas mixture in the processing chamber; and forming a bulk hardmask layer on the transition layer by supplying a main deposition gas mixture in the processing chamber. - View Dependent Claims (17, 18, 19)
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20. A method of forming a hardmask layer on a substrate comprising:
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applying a chucking voltage to a substrate positioned on an electrostatic chuck in a processing chamber; forming a boron nitride layer on a film stack disposed on the substrate by supplying a seed layer gas mixture in the processing chamber while maintaining the chucking voltage; forming a boron tungsten nitride layer on the boron nitride layer by supplying a transition layer gas mixture in the processing chamber; and forming a tungsten nitride layer on the boron nitride layer by supplying a main deposition gas mixture in the processing chamber.
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Specification