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METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM

  • US 20180076385A1
  • Filed: 11/07/2017
  • Published: 03/15/2018
  • Est. Priority Date: 03/19/2014
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing a pressure sensor comprising:

  • bending a substrate by pressing a first surface of the substrate with a member extending in a first direction;

    depositing a first magnetic layer on a second surface of the substrate while the substrate is bended, a magnetization direction of the first magnetic layer being variable;

    depositing an intermediate layer on the first magnetic layer;

    depositing a second magnetic layer on the intermediate layer; and

    fixing a magnetization direction to a second direction crossing the first direction by an annealing process while a magnetic field is applied in the second direction,an initial magnetization direction of the first magnetic layer being neither parallel with nor orthogonal to the second direction.

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