FREQUENCY-MODULATING SENSOR ARRAY

• US 20180087984A1
• Filed: 09/12/2017
• Published: 03/29/2018
• Est. Priority Date: 09/12/2016
• Status: Active Grant

• Current Assignee: SiTime Corporation (Megachips Corporation)
• Original Assignee: SiTime Corporation (Megachips Corporation)
• Inventors: Hagelin, Paul M., Grosjean, Charles I., Goncharov, Lev
• Granted Patent: US 11,320,329 B2
• Time in Patent Office: Days
• CPC Class Codes: G01L 1/146 for measuring force distributions, e.g. using force arrays G01L1/148 takes precedence
• CPC Class Codes: G01L 1/205 using distributed sensing elements
• CPC Class Codes: G01L 5/16 for measuring several components of force
• CPC Class Codes: G01L 9/001 of an element not provided for in the following subgroups of G01L9/0008

Abstract

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

Claims

1. A sensing apparatus comprising:

a first surface;

a plurality of resonant MEMS devices each disposed in physical contact with a respective region of the first surface and having a mechanical resonance frequency that varies according to deflection of the first surface in the respective region of physical contact; and

readout circuitry to obtain, within a first time interval, information indicative of the respective mechanical resonance frequencies of the plurality of resonant MEMS devices sufficient to identify a locus and amplitude of a force applied to the first surface.

2. The sensing apparatus of claim 1 wherein each of the plurality of resonant MEMS devices comprises a resonant MEMS structure and circuitry to (i) apply an actuating signal to the resonant MEMS structure to sustain at least temporary resonant vibration thereof and (ii) circuitry to sense, as the mechanical resonance frequency of the resonant MEMS device, a frequency of the resonant vibration.

3. The sensing apparatus of claim 2 wherein the circuitry to apply the actuating signal to the resonant MEMS structure comprises at least one of (i) circuitry to generate the actuating signal or (ii) circuitry to receive the actuating signal from an external source.

4. The sensing apparatus of claim 1 wherein the first surface comprises a substantially planar surface that encompasses the respective regions of physical contact of at least a portion of the plurality of resonant MEMS devices, the substantially planar surface subject to localized deflection in response to the applied force.

5. The sensing apparatus of claim 1 further comprising circuitry to generate, based on the information indicative of the respective mechanical resonance frequencies, information indicative of the locus and amplitude of the force applied to the first surface.

6. The sensing apparatus of claim 1 wherein the information indicative of the mechanical resonance frequencies comprises a first set of resonance frequency values and wherein the readout circuitry to obtain the first set of resonance frequency values within the first time interval is additionally to obtain, over a sequence of time intervals that follow the first time interval, additional sets of resonance frequency values, the sensing apparatus further comprising circuitry to generate, based on the first set of resonance frequency values and the additional sets of resonance frequency values, information indicative of motion of an object in physical contact with the first surface.

7. The sensing apparatus of claim 6 wherein the circuitry to generate the information indicative of motion of the object in physical contact with the first surface comprises circuitry to generate information indicative of force applied to the first surface by the object as the object moves.

8. The sensing apparatus of claim 1 wherein the readout circuitry to obtain the information indicative of respective mechanical frequencies comprises circuitry to receive, from each of the plurality of resonant MEMS devices, a respective digital value indicative of the mechanical resonance frequency of the resonant MEMS device during the first time interval.

9. The sensing apparatus of claim 8 wherein each of the resonant MEMS devices comprises a resonant MEMS structure and circuitry to (i) enable resonant vibration of the resonant MEMS structure, (ii) generate an oscillating signal in response to the resonant vibration, (iii) detect a frequency of the oscillating signal and (iv) generate, as the respective digital value indicative of the mechanical resonance frequency, a multi-bit digital numeric value according to the frequency of the oscillating signal.

10. The sensing apparatus of claim 1 wherein the readout circuitry to obtain information indicative of the respective mechanical resonance frequencies sufficient to identify the locus of the force applied to the first surface comprises circuitry to obtain information that enables triangulation of a position on the first surface at which the force is applied.

14. The method of claim 1 wherein the first surface comprises a substantially planar surface that encompasses the respective regions of physical contact of at least a portion of the plurality of resonant MEMS devices and that is subject to localized deflection in response to the applied force, and wherein obtaining information indicative of the respective mechanical resonance frequencies of the vibrating resonance members sufficient to identify the locus and amplitude of the force applied to the first surface comprises generating information indicative of locus and amplitude of a force applied to the substantially planar surface.

11. A method of operation within a sensing apparatus having a first surface and a plurality of MEMS devices disposed in physical contact with respective regions of the first surface, the method comprising:

enabling a respective resonant member within each of the plurality of MEMS devices to vibrate at a respective resonance frequency that varies according to deflection of the first surface in the respective region of physical contact; and

obtaining from the plurality of MEMS devices, within a first time interval, information indicative of the respective mechanical resonance frequencies of the vibrating resonance members thereof sufficient to identify a locus and amplitude of a force applied to the first surface.

12. The method of claim 11 wherein enabling the respective resonant member within each of the plurality of MEMS devices to vibrate at the respective resonance frequency comprises applying an actuating signal to the resonant MEMS structure to sustain at least temporary resonant vibration thereof, and wherein obtaining the information indicative of the respective mechanical resonance frequencies comprises sensing vibrational frequencies of the respective resonant members of the MEMS devices.

13. The method of claim 12 wherein applying the actuating signal to the resonant MEMS structure to sustain at least temporary resonant vibration thereof comprises at least one of (i) generating the actuating signal within the MEMS device containing the resonant MEMS structure or (ii) generating the actuating signal externally to the MEMS device containing the resonant MEMS structure and supplying the actuating signal to the MEMS device.

15. The method of claim 11 further comprising generating, based on the information indicative of the respective mechanical resonance frequencies, information indicative of the locus and amplitude of the force applied to the first surface.

16. The method claim 11 wherein the information indicative of the mechanical resonance frequencies comprises a first set of resonance frequency values, and wherein the method further comprises:

obtaining, over a sequence of time intervals that follow the first time interval, additional sets of resonance frequency values; and

generating, based on the first set of resonance frequency values and the additional sets of resonance frequency values, information indicative of motion of an object in physical contact with the first surface.

17. The method of claim 16 wherein generating the information indicative of motion of the object in physical contact with the first surface comprises generating information indicative of force applied to the first surface by the object as the object moves.

18. The method of claim 11 wherein obtaining the information indicative of respective mechanical frequencies comprises receiving, from each of the plurality of MEMS devices, a respective digital value indicative of the mechanical resonance frequency of at which the resonant member therein vibrates during the first time interval.

19. The method of claim 18 further comprising generating the respective digital value within each of the MEMS devices, including generating a multi-bit digital numeric value according to the frequency at which the resonant member within the MEMS device vibrates during the first time interval.

20. The method of claim 11 wherein obtaining information indicative of the respective mechanical resonance frequencies sufficient to identify the locus of the force applied to the first surface comprises obtaining information that enables triangulation of a position on the first surface at which the force is applied.

21. A sensing device comprising:

a first surface;

a plurality of resonant MEMS devices each disposed in physical contact with a respective region of the first surface and having a mechanical resonance frequency that varies according to deflection of the first surface in the respective region of physical contact; and

means for obtaining, within a first time interval, information indicative of the respective mechanical resonance frequencies of the plurality of resonant MEMS devices sufficient to identify a locus and amplitude of a force applied to the first surface.