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DEFECT DETECTION DEVICE AND DEFECT OBSERVATION DEVICE

  • US 20180088469A1
  • Filed: 09/25/2017
  • Published: 03/29/2018
  • Est. Priority Date: 09/26/2016
  • Status: Active Grant
First Claim
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1. A defect detection device comprising:

  • an illumination unit that includes a condenser lens and a plurality of light beam synthesis units, the condenser lens condensing a plurality of light beams, emitted onto a sample and having substantially the same wavelength and substantially the same polarization, on the sample, and the plurality of light beam synthesis units bringing the plurality of light beams into close to each other and making the light beams have light paths parallel to an optical axis of the condenser lens; and

    a detection unit that detects scattered light generated on the sample by the illumination unit.

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