Lithographic Method and Apparatus
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Abstract
A method of determining a configuration of a projection system for a lithographic apparatus, wherein manipulators of the projection system manipulate optical elements so as to adjust its optical properties, the method comprising: receiving dependencies of the optical properties of the projection system on a configuration of the manipulators, receiving a plurality of constraints of the manipulators, formulating a cost function, wherein the cost function represents a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties, wherein the cost function is formulated using the dependency of the optical properties on the configuration of the manipulators, scaling the cost function into a scaled variable space, wherein the scaling is performed by using the plurality of constraints and finding a solution configuration of the manipulators which substantially minimises the scaled cost function subject to satisfying the plurality of constraints.
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Citations
53 Claims
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1. -33. (canceled)
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34. A method comprising:
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receiving dependencies of optical properties of optical elements of a projection system based on a configuration of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements; receiving constraints which correspond to physical constraints of the manipulators; determining a cost function representing a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scaling the cost function into a scaled variable space, wherein the scaling is performed by using the constraints; and configuring the manipulators to substantially minimize the scaled cost function subject to satisfy the constraints. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A method of performing a lithographic exposure comprising:
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determining a configuration of a projection system of a lithographic apparatus, the determining comprising; receiving dependencies of optical properties of optical elements of the projection system based on a configuration of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements; receiving constraints which correspond to physical constraints of the manipulators; determining a cost function representing a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scaling the cost function into a scaled variable space, wherein the scaling is performed by using the constraints; and configuring the manipulators to substantially minimize the scaled cost function subject to satisfy the constraints; adjusting the configuring of the projection system using the determined configuration; projecting a patterned radiation beam onto a substrate using the projection system.
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50. A computer readable medium carrying a computer program comprising computer readable instructions configured to cause a computer to perform operations comprising:
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receiving dependencies of optical properties of optical elements of a projection system based on a configuration of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements; receiving constraints which correspond to physical constraints of the manipulators; determining a cost function representing a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scaling the cost function into a scaled variable space, wherein the scaling is performed by using the constraints; and configuring the manipulators to substantially minimize the scaled cost function subject to satisfy the constraints.
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51. A controller configured to control a projection system for a lithographic apparatus, wherein the projection system comprises a plurality of optical elements and a plurality of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements, thereby adjusting the optical properties of the projection system, the controller being configured to:
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receive dependencies of the optical properties of the projection system on a configuration of the manipulators; receive a plurality of constraints which correspond to the physical constraints of the manipulators; formulate a cost function, wherein the cost function represents a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scale the cost function into a scaled variable space, wherein the scaling is performed by using the plurality of constraints; and find a solution configuration of the manipulators which substantially minimises the scaled cost function subject to satisfying the plurality of constraints.
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52. A projection system for a lithographic apparatus, the projection system comprising:
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a plurality of optical elements; a plurality of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements, thereby adjusting the optical properties of the projection system; and a controller configured to control a projection system for a lithographic apparatus, wherein the projection system comprises a plurality of optical elements and a plurality of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements, thereby adjusting the optical properties of the projection system, the controller being configured to; receive dependencies of the optical properties of the projection system on a configuration of the manipulators; receive a plurality of constraints which correspond to the physical constraints of the manipulators; formulate a cost function, wherein the cost function represents a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scale the cost function into a scaled variable space, wherein the scaling is performed by using the plurality of constraints; and find a solution configuration of the manipulators which substantially minimises the scaled cost function subject to satisfying the plurality of constraints.
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53. A lithographic apparatus comprising:
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an illumination system configured to condition a radiation beam; a support structure constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; and a projection system comprising; a plurality of optical elements; a plurality of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements, thereby adjusting the optical properties of the projection system; and a controller configured to control a projection system for a lithographic apparatus, wherein the projection system comprises a plurality of optical elements and a plurality of manipulators operable to manipulate the optical elements so as to adjust the optical properties of the optical elements, thereby adjusting the optical properties of the projection system, the controller being configured to; receive dependencies of the optical properties of the projection system on a configuration of the manipulators; receive a plurality of constraints which correspond to the physical constraints of the manipulators; formulate a cost function, wherein the cost function represents a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties of the projection system, wherein the cost function is formulated using the dependency of the optical properties of the projection system on the configuration of the manipulators; scale the cost function into a scaled variable space, wherein the scaling is performed by using the plurality of constraints; and find a solution configuration of the manipulators which substantially minimises the scaled cost function subject to satisfying the plurality of constraints.
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Specification