SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING AN ESD PROTECTION CIRCUIT
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Abstract
Diffusion regions having the same conductivity type are arranged on a side of a second wiring and a side of a third wiring, respectively under a first wiring connected to a signal terminal. Diffusion regions are separated in a whole part or one part of a range in a Y direction. That is, under first wiring, diffusion regions are only formed in parts opposed to diffusion regions formed under the second wiring and third wiring connected to a power supply terminal or a ground terminal, and a diffusion region is not formed in a central part in an X direction. Therefore, terminal capacity of the signal terminal can be reduced without causing ESD resistance to be reduced, in an ESD protection circuit with the signal terminal.
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Citations
21 Claims
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1. (canceled)
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2. A semiconductor integrated circuit device having an ESD (Electro Static Discharge) protection circuit, wherein:
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the ESD protection circuit comprises; a first wiring extending in a first direction and electrically connected to a first terminal; a second wiring and a third wiring extending in the first direction, electrically connected to a power supply terminal or a ground terminal, and disposed on both sides of the first wiring respectively; a first region and a second region having a first conductivity type, that are connected to and formed under the first wiring and disposed between the second wiring and the third wiring in a second direction perpendicular to the first direction, the first and second regions being at least partially separated from each other and serving as one of an anode or a cathode of a diode; a third region having a second conductivity type, that is connected to and formed under the second wiring and disposed so as to be opposed to the first region in the second direction; and a fourth region having the second conductivity type, that is connected to and formed under the third wiring and disposed so as to be opposed to the second region in the second direction, the third and fourth regions serving as the other of an anode or a cathode of the diode, the third region, the first region, the second region and the fourth region are disposed in this order in the second direction, and the first conductivity type is different from the second conductivity type. - View Dependent Claims (3, 4, 5, 6, 7)
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8. A semiconductor integrated circuit device having an ESD (Electro Static Discharge) protection circuit, wherein:
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the ESD protection circuit comprises; a first wiring extending in a first direction and electrically connected to a first terminal; a second wiring and a third wiring extending in the first direction, electrically connected to a second terminal, and disposed on both sides of the first wiring respectively; a fourth wiring extending in the first direction and electrically connected to the first terminal; a fifth wiring extending in the first direction and electrically connected to the second terminal; a first region and a second region having a first conductivity type, that are connected to and formed under the first wiring and disposed between the second wiring and the third wiring in a second direction perpendicular to the first direction, the first and second regions being at least partially separated from each other; a third region having a second conductivity type, that is connected to and formed under the second wiring and disposed so as to be opposed to the first region in the second direction; a fourth region having the second conductivity type, that is connected to and formed under the third wiring and disposed so as to be opposed to the second region in the second direction, a fifth region and a sixth region having the first conductivity type, that are connected to and formed under the fourth wiring and disposed between the third wiring and the fifth wiring in the second direction, the fifth and sixth regions being at least partially separated from each other, and the first, second, fifth and sixth regions serving as one of an anode or a cathode of a diode; and a seventh region having the second conductivity type, that is connected to and formed under the fifth wiring and disposed so as to be opposed to the sixth region in the second direction, the third, fourth and seventh regions serving as the other of an anode or a cathode of the diode, the third region, the first region, the second region, the fourth region, the fifth region, the sixth region and the seventh region are disposed in this order in the second direction, the second wiring, the first wiring, the third wiring, the fourth wiring and the fifth wiring are disposed in this order in the second direction, and the first conductivity type is different from the second conductivity type. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A semiconductor integrated circuit device having an ESD (Electro Static Discharge) protection circuit, wherein:
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the ESD protection circuit comprises; a first wiring extending in a first direction and electrically connected to a first terminal; a second wiring and a third wiring extending in the first direction, electrically connected to a power supply terminal or a ground terminal, and disposed on both sides of the first wiring respectively; a first region and a second region having a first conductivity type, that are connected to and formed under the first wiring and disposed between the second wiring and the third wiring in a second direction perpendicular to the first direction, the first and second regions being separated from each other and serving as one of an anode or a cathode of a diode; a third region and a fourth region having a second conductivity type, that are connected to and formed under the second wiring, and the fourth region being disposed so as to be opposed to the first region in the second direction, the third and fourth regions being separated from each other; and a fifth region and a sixth region having the second conductivity type, that are connected to and formed under the third wiring, and the fifth region being disposed so as to be opposed to the second region in the second direction, the fifth and sixth regions being separated from each other, and the fifth and sixth regions serving as the other of an anode or a cathode of the diode, the third region is disposed further away from the first region than the fourth region, and the sixth region is disposed further away from the second region than the fifth region, and the first conductivity type is different from the second conductivity type. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification