STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
First Claim
1. :
- A sensing element provided on a film being deformable, the sensing element comprising;
a non-magnetic layer;
a first magnetic layer;
a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride;
a second magnetic layer provided between the functional layer and the first magnetic layer; and
a spacer layer provided between the first magnetic layer and the second magnetic layer,at least a part of the second magnetic layer being amorphous and including boron, andan electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
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Abstract
According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
8 Citations
16 Claims
-
1. :
- A sensing element provided on a film being deformable, the sensing element comprising;
a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film. - View Dependent Claims (2, 3, 4, 6, 7, 8, 9, 10, 11, 12)
- A sensing element provided on a film being deformable, the sensing element comprising;
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5. :
- A sensing element provided on a film being deformable, the sensing element comprising;
a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one element selected from the group consisting of magnesium, silicon, and aluminum; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
- A sensing element provided on a film being deformable, the sensing element comprising;
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13. :
- A pressure sensor comprising;
a film being deformable; and a sensing element provided on the film, the sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
- A pressure sensor comprising;
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14. :
- A microphone comprising;
a pressure sensor, the pressure sensor including; a film being deformable; and a sensing element provided on the film, the sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
- A microphone comprising;
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15. :
- A blood pressure sensor comprising;
a pressure sensor, the pressure sensor including; a film being deformable; and a sensing element provided on the film, the sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
- A blood pressure sensor comprising;
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16. :
- A touch panel comprising;
a pressure sensor, the pressure sensor including; a film being deformable; and a sensing element provided on the film, the sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron, and an electric resistance of the sensing element being configured to change in accordance with a deformation of the film.
- A touch panel comprising;
Specification