PECVD BOAT

• US 20180119278A1
• Filed: 04/13/2016
• Published: 05/03/2018
• Est. Priority Date: 04/13/2015
• Status: Active Application

• Current Assignee: Kornmeyer Carbon-Group GmbH
• Original Assignee: Kornmeyer Carbon-Group GmbH
• Inventors: KORNMEYER, Torsten, VOLK, Hans-Peter
• Application Number:
  US15/566,030
• Publication Number:
  US 20180119278A1
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/4587 the substrate being supported substantially vertically
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01L 21/67313 Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Abstract

A PECVD boat has at least one boat plate for accommodating wafers, for transport into and out of vacuum coating chambers. The boat plate is oriented vertically and has a plurality of U-shaped accommodating slots for accommodating wafers, which slots are oriented in the longitudinal direction of the boat plate and are open at the top, in such a way that the wafers inserted into the accommodating slots are aligned with the plate line of the boat plate.

Claims

1. A PECVD boat having at least one boat plate for receiving wafers, for transport into and out of vacuum coating chambers, wherein the boat plate is oriented vertically and has multiple U-shaped receiving slots oriented in a longitudinal direction of the boat plate and open at a top, for receiving wafers, such that the wafers inserted into the receiving slots are flush with a plate line of the boat plate.

2. The PECVD boat as claimed in claim 1, wherein each receiving slot is bounded by lateral retaining arms and a lower frame element of the boat plate, so that a wafer inserted into the receiving slot is partially surrounded by the lateral retaining arms.

3. The PECVD boat as claimed in claim 2, further including three receiving elements, wherein the lateral retaining arms and the lower frame element are each provided with one of the receiving elements, and the receiving elements are oriented inward into the receiving slot and grip around an outer edge of the inserted wafer in a U-shaped or fork-like manner and secure the wafer using just weight of the wafer.

4. The PECVD boat as claimed in claim 3, wherein the receiving elements of each receiving slot accommodates two wafers in back-to-back loading.

5. The PECVD boat as claimed in claim 1, including multiple boat plates arranged parallel, spaced apart from and next to one another, and connected to one another.

6. The PECVD boat as claimed in claim 5, further comprising spacing and connecting elements, made of a nonconductive material, located between the boat plates.

7. The PECVD boat as claimed in claim 6, wherein the spacing or connecting elements are made of Al₂O₃, quartz glass or ceramic.

8. The PECVD boat as claimed in claim 5, wherein the boat plates comprise shaped graphite, CFC or titanium.