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Transfer Head for Transferring Micro Element and Transferring Method of Micro Element

  • US 20180122683A1
  • Filed: 01/01/2018
  • Published: 05/03/2018
  • Est. Priority Date: 09/30/2016
  • Status: Active Grant
First Claim
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1. A transfer head for transferring micro elements, comprising:

  • a cavity;

    a plurality of vacuum paths connected with the cavity respectively and including valves for opening/closing;

    a plurality of suction nozzles connected with the vacuum paths configured to hold or release the micro elements via vacuum pressure transmitted by each vacuum path; and

    a switching component for controlling the valves to open/close the vacuum paths, so as to control the suction nozzles to hold or release required micro elements via vacuum pressure.

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