STORAGE DEVICE AND PHOTORESIST COATING AND DEVELOPING MACHINE HAVING STORAGE DEVICE

• US 20180130682A1
• Filed: 04/20/2017
• Published: 05/10/2018
• Est. Priority Date: 05/11/2016
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd., Chongqing BOE Optoelectronics Technology Co., Ltd. (BOE Technology Group Co., Ltd.)
• Original Assignee: BOE Technology Group Co., Ltd., Chongqing BOE Optoelectronics Technology Co., Ltd. (BOE Technology Group Co., Ltd.)
• Inventors: Wang, Zhichao, Song, Xiangyu, Guan, Yongbing, Liu, Bingqiang, Cao, Kun
• Granted Patent: US 10,446,424 B2
• Time in Patent Office: Days
• CPC Class Codes: B65G 1/10 with relatively movable racks to facilitate insertion or removal of articles cabinets with means for moving compartments up and down A47B51/00; cabinet system, e.g. consisting of cabinets arranged in a row with means to open or close passages between adjacent cabinets A47B53/02
• CPC Class Codes: G03F 7/16 Coating processes; Apparatus therefor applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74
• CPC Class Codes: H01L 21/67309 characterized by the substrate support

Abstract

A storage device and a photoresist coating and developing machine having a storage device are disclosed. The storage device includes a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, being used for receiving substrates to be exposed. The frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on the support member.

Claims

1. A storage device, comprising a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, the support plates being used for receiving substrates to be exposed, wherein the frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on a respective support member.

2. The storage device according to claim 1, wherein a locking mechanism for fixing the support plates is provided at a side of the frame where the substrates are to be picked up.

3. The storage device according to claim 2, wherein a position limiting plate is provided at a side of the frame opposite to the side where the locking mechanism is provided.

4. The storage device according to claim 2, wherein the locking mechanism comprises a first screw hole provided in the frame, a second screw hole provided in the support plate, and a bolt cooperated with the first screw hole and the second screw hole.

5. The storage device according to claim 2, wherein the locking mechanism comprises a front baffle plate fixed to the frame by a hinge.

6. The storage device according to claim 1, wherein pulleys are provided below both sides of each support plate.

7. The storage device according to claim 6, wherein each support member comprises first sliding chutes provided in the frame in parallel to a sliding direction of each support plate and cooperated with the pulleys.

8. The storage device according to claim 1, wherein slide rails are provided on both sides of each support plate parallel to a sliding direction of the support plate, and each support member comprises second sliding chutes provided on both sides of the frame in parallel to the sliding direction of the support plate and cooperated with the slide rails.

9. The storage device according to claim 1, wherein a plurality of support posts are provided on each support plate.

10. A photoresist coating and developing machine, comprising the storage device according to claim 1.

11. The storage device according to claim 2, wherein a plurality of support posts are provided on each support plate.

12. The storage device according to claim 11, wherein four support posts are provided on each support plate.

13. The storage device according to claim 7, wherein a plurality of support posts are provided on each support plate.

14. The storage device according to claim 13, wherein four support posts are provided on each support plate.

15. The storage device according to claim 4, wherein pulleys are provided below both sides of each support plate, and

wherein each support member comprises first sliding chutes provided in the frame in parallel to a sliding direction of the support plate and cooperated with the pulleys.

16. The storage device according to claim 7, wherein each first sliding chute comprises a lower plate body and two upright plates extending upwards from the lower plate body, a slide passage is formed between the two upright plates, and the lower plate body is fixed to the frame.

17. The storage device according to claim 13, wherein each first sliding chute comprises a lower plate body and two upright plates extending upwards from the lower plate body, a slide passage is formed between the two upright plates, and the lower plate body is fixed to the frame.

18. The storage device according to claim 15, wherein each first sliding chute comprises a lower plate body and two upright plates extending upwards from the lower plate body, a slide passage is formed between the two upright plates, and the lower plate body is fixed to the frame.

19. The storage device according to claim 4, wherein slide rails are provided on both sides of each support plate parallel to a sliding direction of the support plate, and each support member comprises second sliding chutes provided on both sides of the frame in parallel to the sliding direction of the support plate and cooperated with the slide rails.

20. The storage device according to claim 8, wherein a cross section of each second sliding chute perpendicular to a longitudinal extending direction of the second sliding chute is U-shaped, the second sliding chute comprises an opening, a bottom plate opposite to the opening, and two side plates, and an accommodation space is formed inside the second sliding chute;

wherein in a mounted state of the support plate, the support plate is sandwiched in the opening, and the slide rail is accommodated in the accommodation space.