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STORAGE DEVICE AND PHOTORESIST COATING AND DEVELOPING MACHINE HAVING STORAGE DEVICE

  • US 20180130682A1
  • Filed: 04/20/2017
  • Published: 05/10/2018
  • Est. Priority Date: 05/11/2016
  • Status: Active Grant
First Claim
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1. A storage device, comprising a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, the support plates being used for receiving substrates to be exposed, wherein the frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on a respective support member.

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