ELECTRONIC DEVICE MANUFACTURING LOAD PORT APPARATUS, SYSTEMS, AND METHODS
First Claim
1. A carrier door opener for a load port configured to interface with a substrate carrier, the carrier door opener comprising:
- a groove along an outer portion of the carrier door opener; and
a hollow O-ring seated in the groove, the hollow O-ring configured to engage a panel of the load port when the carrier door opener is closed against the panel;
wherein the carrier door opener is configured to seal a panel opening of the load port when the carrier door opener is closed, and to contact and open a door of a substrate carrier located at the load port.
1 Assignment
0 Petitions
Accused Products
Abstract
An electronic device manufacturing system includes a factory interface that has a load port. The load port may include a panel having an opening therein and a carrier door opener that seals the opening when the door is closed. The carrier door opener may have a groove along an outer portion of the door. The groove may have a cross-sectional shape of a triangular prism frustum. A hollow O-ring may be seated in the groove and is configured to engage the panel when the carrier door opener is closed against the panel. Methods of assembling a factory interface for an electronic device manufacturing system are also provided, as are other aspects.
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Citations
20 Claims
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1. A carrier door opener for a load port configured to interface with a substrate carrier, the carrier door opener comprising:
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a groove along an outer portion of the carrier door opener; and a hollow O-ring seated in the groove, the hollow O-ring configured to engage a panel of the load port when the carrier door opener is closed against the panel; wherein the carrier door opener is configured to seal a panel opening of the load port when the carrier door opener is closed, and to contact and open a door of a substrate carrier located at the load port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electronic device manufacturing system, comprising:
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a substrate process tool; and a factory interface comprising; a housing having a front side and a rear side, the front side having a front side opening and the rear side coupled to the substrate process tool; and a load port configured to interface with a substrate carrier, the load port comprising; a panel coupled to the front side at the front side opening and having a panel opening; a carrier door opener that seals the panel opening when the carrier door opener is closed, that contacts and opens a door of a substrate carrier located at the load port, and that comprises a groove along an outer portion of the carrier door opener; and a hollow O-ring seated in the groove, the hollow O-ring configured to engage the panel when the carrier door opener is closed against the panel. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A method of assembling a factory interface for an electronic device manufacturing system, the method comprising:
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providing a load port configured to interface with a substrate carrier, the load port comprising a panel having a panel opening; providing a carrier door opener that seals the panel opening when the carrier door opener is closed, that contacts and opens a door of a substrate carrier located at the load port, and that comprises a groove along an outer portion of the carrier door opener; and seating a hollow O-ring into the groove, the hollow O-ring configured to engage the panel when the carrier door opener is closed against the panel. - View Dependent Claims (17, 18, 19, 20)
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Specification