LEAK CHECKING METHOD, LEAK CHECKING APPARATUS, ELECTROPLATING METHOD, AND ELECTROPLATING APPARATUS
First Claim
1. A leak checking method comprising:
- holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed;
pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder;
covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap;
forming a hermetic space between the sealing cap and the substrate holder;
introducing a pressurized gas into the hermetic space; and
detecting a decrease in pressure of the pressurized gas in the hermetic space.
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Accused Products
Abstract
There is disclosed an improved leak checking method which can accurately test a sealing performance of a substrate holder more than conventional leak check techniques. The leak checking method includes: holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed; pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder; covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap; forming a hermetic space between the sealing cap and the substrate holder; introducing a pressurized gas into the hermetic space; and detecting a decrease in pressure of the pressurized gas in the hermetic space.
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Citations
22 Claims
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1. A leak checking method comprising:
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holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed; pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder; covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap; forming a hermetic space between the sealing cap and the substrate holder; introducing a pressurized gas into the hermetic space; and detecting a decrease in pressure of the pressurized gas in the hermetic space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 13, 14)
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8. A leak checking method comprising:
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holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the first holding member having a first opening and a back-side sealing projection, the second holding member having a second opening and a front-side sealing projection; pressing the front-side sealing projection and the back-side sealing projection against a front surface and a back surface, respectively, of the substrate when holding the substrate with the substrate holder; covering the front surface of the substrate, exposed through the second opening, and the front-side sealing projection with a front-side sealing cap; forming a front-side hermetic space between the front-side sealing cap and the substrate holder; covering the back surface of the substrate, exposed through the first opening, and the back-side sealing projection with a back-side sealing cap; forming a back-side hermetic space between the back-side sealing cap and the substrate holder; introducing a pressurized gas into the front-side hermetic space and/or the back-side hermetic space; and detecting a decrease in pressure of the pressurized gas in the front-side hermetic space and/or the back-side hermetic space. - View Dependent Claims (9, 10, 11, 12)
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15. A leak checking apparatus for checking for leakage of a fluid through a sealing projection of a substrate holder when the sealing projection is being pressed against a surface of a substrate held by the substrate holder which includes a first holding member and a second holding member, the second holding member having the sealing projection and an opening through which a surface of the substrate is to be exposed, said apparatus comprising:
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a sealing cap having a shape that covers the opening and the sealing projection; a pressurized-gas supply system configured to introduce a pressurized gas into a hermetic space formed between the sealing cap and the substrate holder; and a pressure decrease detector configured to detect a decrease in pressure of the pressurized gas in the hermetic space. - View Dependent Claims (16, 17, 18)
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19. A leak checking apparatus for checking for leakage of a fluid through a front-side sealing projection and a back-side sealing projection of a substrate holder when the front-side sealing projection and the back-side sealing projection are being pressed against a front surface and a back surface, respectively, of a substrate held by the substrate holder which includes a first holding member and a second holding member, the first holding member having a first opening and the back-side sealing projection, the second holding member having a second opening and the front-side sealing projection, said apparatus comprising:
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a front-side sealing cap having a shape that covers the second opening and the front-side sealing projection; a back-side sealing cap having a shape that covers the first opening and the back-side sealing projection; a pressurized-gas supply system configured to introduce a pressurized gas into a front-side hermetic space formed between the front-side sealing cap and the substrate holder, and into a back-side hermetic space formed between the back-side sealing cap and the substrate holder; and a pressure decrease detector configured to detect a decrease in pressure of the pressurized gas in the front-side hermetic space and the back-side hermetic space. - View Dependent Claims (20, 21, 22)
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Specification