EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORMATION
First Claim
Patent Images
1. A chamber, comprising:
- a chamber body and a lid defining an interior volume;
a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation; and
a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
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Accused Products
Abstract
In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
3 Citations
20 Claims
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1. A chamber, comprising:
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a chamber body and a lid defining an interior volume; a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation; and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A chamber, comprising:
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a chamber body and a lid defining an interior volume; a frame within the interior volume, the frame sized to receive a first carrier having a plurality of substrates disposed in the first carrier in a face-up orientation; a second carrier disposable over the first carrier; and a rotational drive assembly coupled to the frame for rotating the first carrier and the second carrier. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method for transferring a plurality of substrates, comprising:
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transferring a first carrier to a frame structure within a chamber, wherein the first carrier includes a plurality of substrates disposed in a face-up orientation; transferring a second carrier to the frame structure in a position adjacent to the first carrier; and rotating the frame structure to move the plurality of substrates to the second carrier. - View Dependent Claims (17, 18, 19, 20)
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Specification