SEMICONDUCTOR DEVICE

• US 20180145138A1
• Filed: 01/18/2018
• Published: 05/24/2018
• Est. Priority Date: 06/29/2012
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: SASAKI, Toshinari, HAMOCHI, Takashi, MIYAMOTO, Toshiyuki, NOMURA, Masafumi, KOEZUKA, Junichi, OKAZAKI, Kenichi
• Granted Patent: US 10,453,927 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 29/247 Amorphous materials
• CPC Class Codes: H01L 29/78606 with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device H01L29/78642, H01L29/78645 take precedence
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

In a transistor including an oxide semiconductor film, movement of hydrogen and nitrogen to the oxide semiconductor film is suppressed. Further, in a semiconductor device using a transistor including an oxide semiconductor film, a change in electrical characteristics is suppressed and reliability is improved. A transistor including an oxide semiconductor film and a nitride insulating film provided over the transistor are included, and an amount of hydrogen molecules released from the nitride insulating film by thermal desorption spectroscopy is less than 5×10²¹ molecules/cm³, preferably less than or equal to 3×10²¹ molecules/cm³, more preferably less than or equal to 1×10²¹ molecules/cm³, and an amount of ammonia molecules released from the nitride insulating film by thermal desorption spectroscopy is less than 1×10²² molecules/cm³, preferably less than or equal to 5×10²¹ molecules/cm³, more preferably less than or equal to 1×10²¹ molecules/cm³.

Claims

1. (canceled)

2. A method for manufacturing a semiconductor device comprising the steps of:

forming a first gate electrode;

forming a gate insulating film over the first gate electrode;

forming an oxide semiconductor film over the gate insulating film, the oxide semiconductor film overlapping with the first gate electrode;

forming a pair of electrodes in contact with the oxide semiconductor film; and

forming a nitride insulating film over the oxide semiconductor film by a plasma CVD method using a source gas containing nitrogen and ammonia,

wherein in the step of forming the nitride insulating film, a flow ratio of the nitrogen to the ammonia is greater than or equal to 5 and less than or equal to 50.

3. The method for manufacturing a semiconductor device according to claim 2,

wherein the flow ratio of the nitrogen to the ammonia is greater than or equal to 10 and less than or equal to 50.

4. The method for manufacturing a semiconductor device according to claim 2, further comprising the step of:

forming an oxide insulating film over the oxide semiconductor film before the step of forming the nitride insulating film,

wherein the oxide insulating film is in contact with part of the oxide semiconductor film.

5. The method for manufacturing a semiconductor device according to claim 2,

wherein in the case where the nitride insulating film is analyzed by thermal desorption spectroscopy, hydrogen molecules less than 5×

10²¹ molecules/cm³ and ammonia molecules less than 1×

10²² molecules/cm³ are released.

6. The method for manufacturing a semiconductor device according to claim 2, further comprising a step of:

performing a heat treatment on the oxide semiconductor film in an atmosphere containing nitrogen and oxygen.

7. The method for manufacturing a semiconductor device according to claim 2,

wherein the source gas further contains a deposition gas containing silicon.

8. The method for manufacturing a semiconductor device according to claim 2, further comprising the step of:

forming a second gate electrode over the nitride insulating film, the second gate electrode overlapping with the first gate electrode.

9. A method for manufacturing a semiconductor device comprising the steps of:

forming an insulating film;

forming an oxide semiconductor film over the insulating film;

forming a pair of electrodes in contact with the oxide semiconductor film;

forming a gate insulating film comprising a nitride insulating film over the oxide semiconductor film; and

forming a gate electrode over the gate insulating film,

wherein the nitride insulating film is formed by a plasma CVD method using a source gas containing nitrogen and ammonia, and

wherein in the step of forming the nitride insulating film, a flow ratio of the nitrogen to the ammonia is greater than or equal to 5 and less than or equal to 50.

10. The method for manufacturing a semiconductor device according to claim 9,

wherein the insulating film comprises an oxide insulating film, and

wherein oxygen is added to the oxide insulating film before the step of forming the oxide semiconductor film.

11. The method for manufacturing a semiconductor device according to claim 9,

wherein the flow ratio of the nitrogen to the ammonia is greater than or equal to 10 and less than or equal to 50.

12. The method for manufacturing a semiconductor device according to claim 9,

wherein the gate insulating film further comprises an oxide insulating film, and

wherein the oxide insulating film is between the oxide semiconductor film and the nitride insulating film.

13. The method for manufacturing a semiconductor device according to claim 9,

wherein in the case where the nitride insulating film is analyzed by thermal desorption spectroscopy, hydrogen molecules less than 5×

10²¹ molecules/cm³ and ammonia molecules less than 1×

10²² molecules/cm³ are released.

14. The method for manufacturing a semiconductor device according to claim 9, further comprising the step of:

performing a heat treatment on the oxide semiconductor film in an atmosphere containing nitrogen and oxygen.

15. The method for manufacturing a semiconductor device according to claim 9,

wherein the source gas further contains a deposition gas containing silicon.

16. A method for manufacturing a semiconductor device comprising the steps of:

forming a first gate electrode;

forming a gate insulating film comprising a first nitride insulating film over the first gate electrode;

forming an oxide semiconductor film over the gate insulating film, the oxide semiconductor film overlapping with the first gate electrode;

forming a pair of electrodes electrically connected to the oxide semiconductor film; and

forming a second nitride insulating film over the oxide semiconductor film,

wherein the first nitride insulating film and the second nitride insulating film are each formed by a plasma CVD method using a source gas containing nitrogen and ammonia, and

wherein in each of the step of forming the first nitride insulating film and the step of forming the second nitride insulating film, a flow ratio of the nitrogen to the ammonia is greater than or equal to 5 and less than or equal to 50.

17. The method for manufacturing a semiconductor device according to claim 16,

wherein the flow ratio of the nitrogen to the ammonia is greater than or equal to 10 and less than or equal to 50.

18. The method for manufacturing a semiconductor device according to claim 16, further comprising the step of:

forming an oxide insulating film over the oxide semiconductor film before the step of forming the second nitride insulating film,

wherein the oxide insulating film is in contact with part of the oxide semiconductor film.

19. The method for manufacturing a semiconductor device according to claim 16,

wherein in the case where each of the first nitride insulating film and the second nitride insulating film are analyzed by thermal desorption spectroscopy, hydrogen molecules less than 5×

10²¹ molecules/cm³ and ammonia molecules less than 1×

10²² molecules/cm³ are released.

20. The method for manufacturing a semiconductor device according to claim 16, further comprising a step of:

performing a heat treatment on the oxide semiconductor film in an atmosphere containing nitrogen and oxygen.

21. The method for manufacturing a semiconductor device according to claim 16,

wherein the source gas further contains a deposition gas containing silicon.

22. The method for manufacturing a semiconductor device according to claim 16, further comprising the step of:

forming a second gate electrode over the second nitride insulating film, the second gate electrode overlapping with the first gate electrode.