DEVICE FOR DESORBING MOLECULES FROM CHAMBER WALLS
First Claim
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1. A desorption device, comprising:
- a substrate having a disc-shaped wafer form factor, wherein the substrate includes a support surface;
a plurality of light emitting diodes (LEDs) mounted on the support surface, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered;
a power source mounted on the substrate, wherein the power source is electrically coupled to the plurality of LEDs to electrically power the plurality of LEDs; and
a heat exchanger thermally coupled to at least one of the plurality of LEDs.
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Abstract
Embodiments include devices and methods for desorbing molecules from a chamber wall. In an embodiment, a desorption device includes several light emitting diodes (LEDs) mounted on a substrate having a wafer form factor. The LEDs may emit ultraviolet (UV) radiation, such as UV radiation in a UV C range. In an embodiment, the LEDs are thermally coupled to a heat exchanger, such as a thermoelectric cooling device. The emitted radiation may uniformly irradiate a chamber wall to desorb water molecules from the chamber wall. Other embodiments are also described and claimed.
23 Citations
20 Claims
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1. A desorption device, comprising:
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a substrate having a disc-shaped wafer form factor, wherein the substrate includes a support surface; a plurality of light emitting diodes (LEDs) mounted on the support surface, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered; a power source mounted on the substrate, wherein the power source is electrically coupled to the plurality of LEDs to electrically power the plurality of LEDs; and a heat exchanger thermally coupled to at least one of the plurality of LEDs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A desorption device, comprising:
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a substrate having a disc-shaped wafer form factor, wherein the substrate includes a support surface; a heat exchanger mounted on the substrate, wherein the heat exchanger includes a thermoelectric cooling device encapsulated in an insulated cover; and a light emitting diode (LED) thermally coupled to the heat exchanger, wherein the LED emits ultraviolet (UV) radiation when electrically powered. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method comprising:
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irradiating a chamber wall surrounding a chamber volume by a plurality of light emitting diodes (LEDs) of a desorption device, wherein the device includes a substrate having a support surface, the substrate having a disc-shaped wafer form factor, wherein the LEDs are mounted on the support surface, and wherein the LEDs emit ultraviolet (UV) radiation; reducing a chamber pressure of the chamber volume to a test pressure; and determining whether a test gas is present in the chamber volume when the chamber pressure is at the test pressure. - View Dependent Claims (18, 19, 20)
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Specification