APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE

• US 20180149673A1
• Filed: 05/12/2016
• Published: 05/31/2018
• Est. Priority Date: 05/19/2015
• Status: Active Grant

• Current Assignee: Nanyang Technological University
• Original Assignee: Nanyang Technological University
• Inventors: HUO, Fengwei, WU, Jin
• Granted Patent: US 10,168,353 B2
• Time in Patent Office: Days
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 70/14 Particular materials
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18

Abstract

An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

Claims

1. An apparatus for investigating a sample surface, the apparatus comprising:

a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface;

an actuator configured to move the probe array towards the sample surface;

a light source configured to illuminate the probe tips with an illumination through the substrate; and

an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

2. An apparatus according to claim 1 wherein the probe tips comprise an elastomer.

3. An apparatus according to claim 2, wherein the probe tips comprise polydimethylsiloxane (PDMS).

4. An apparatus according to claim 1, wherein the actuator is configured to move the probe array towards the sample surface and away from the sample surface.

5. An apparatus according to claim 1, further comprising an XY scanning stage configured to scan the probe array parallel to the sample surface.

6. An apparatus according to claim 1, wherein the probe tips of the probe array have a length of between 1 μ

m and 500 μ

m.

7. An apparatus according to claim 1, wherein the actuator is configured to move the probe array towards and/or away from the sample surface at a speed in the range of 0.1 μ

m/s to 2000 μ

m/s.

8. An apparatus according to claim 1, wherein the actuator is configured to move the probe array towards and/or away from the sample surface through a distance of 0 μ

m to 50 μ

m.

9. A method of investigating a sample surface, the method comprising

arranging a probe array over the sample surface, the probe array comprising a substrate and a plurality of probe tips from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface;

illuminating the probe tips with an illumination through the substrate;

moving the probe array relative to the sample surface;

detecting a timing of a change in intensity of the illumination reflected from each probe tip of the plurality of probe tips; and

determining a property of the sample surface from the timing of the change in intensity of the illumination reflected from each probe tip of the plurality of probe tips.

10. A method according to claim 9, wherein the property of the sample surface is a topology of the sample surface.

11. A method according to claim 9, wherein the property of the sample surface is a surface chemistry of the sample surface.

12. A method according to claim 9, wherein moving the probe array relative to the sample surface comprises moving the probe array towards the sample surface and moving the probe array away from the sample surface and wherein detecting a timing of a change in intensity of the illumination reflected from each probe tip of the plurality of probe tips comprises detecting a timing of a first change in intensity corresponding to that probe tip coming into contact with the sample surface and detecting a timing of a second change in intensity corresponding to that probe tip coming out of contact with the probe surface.

13. A method according to claim 9, further comprising scanning the probe array across the sample surface.

14. A method according to claim 9, wherein detecting a timing of change in intensity of the illumination reflected from each probe tip of the plurality of probe tips comprises monitoring an area corresponding to each probe tips of less than 25×

25 pixels.