THREE DIMENSIONAL INTEGRATED CIRCUITS EMPLOYING THIN FILM TRANSISTORS
First Claim
1. A memory device comprising:
- an insulative substrate;
a non-monocrystalline active-device layer deposited upon the insulative substrate, the non-monocrystalline active device layer comprising a plurality of active devices;
an insulative layer on the non-monocrystalline active-device layer; and
a three-dimensional volumetric memory array disposed on top of the insulative layer and directly above one or more to the plurality of active devices,wherein the three-dimensional volumetric memory array is electrically connected to the non-monocrystalline active-device layer via a plurality of vias through the insulative layer and between the three-dimensional volumetric memory array and the non-monocrystalline active device layer.
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Accused Products
Abstract
An integrated circuit which enables lower cost and improved features compared to standard crystalline silicon integrated circuits by utilizing thin film transistors (TFTs) in 2D and 3D memory and logic devices, including NAND flash memory and other nonvolatile memories such as RRAM, NRAM, MRAM, FeRAM or PCRAM. By utilizing TFTs, density is improved and die area and costs are reduced. Volumetric memory arrays of several layers may be fabricated with greatly reduced area requirements for periphery circuits and routing. Under 5% area requirements are possible. Ultra-wide I/O may be implemented without die area penalty. Vertical TFTs and logic gates provide better density and high speed approaching or exceeding that of crystalline silicon.
26 Citations
26 Claims
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1. A memory device comprising:
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an insulative substrate; a non-monocrystalline active-device layer deposited upon the insulative substrate, the non-monocrystalline active device layer comprising a plurality of active devices; an insulative layer on the non-monocrystalline active-device layer; and a three-dimensional volumetric memory array disposed on top of the insulative layer and directly above one or more to the plurality of active devices, wherein the three-dimensional volumetric memory array is electrically connected to the non-monocrystalline active-device layer via a plurality of vias through the insulative layer and between the three-dimensional volumetric memory array and the non-monocrystalline active device layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A memory device comprising:
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a substrate; a three-dimensional volumetric memory array disposed on top of the substrate; and a non-monocrystalline active device layer disposed upon the three-dimensional volumetric memory array, the non-monocrystalline active device layer comprising a plurality of active devices, wherein the non-monocrystalline active device layer is electrically connected to the three-dimensional volumetric memory array via a plurality of vias that are located between the three-dimensional volumetric memory array and the non-monocrystalline active device layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A memory device comprising:
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a substrate having a first plurality of active devices; a first insulative layer on the substrate; a non-monocrystalline active-device layer on the first insulative layer, the non-monocrystalline active-device layer having a second plurality of active devices, wherein one or more of the second plurality of active devices is in electrical communication with one or more of the first plurality of active devices via one or more vias through the first insulative layer and between the non-monocrystalline active-device layer and the substrate; a second insulative layer on the non-monocrystalline active-device layer; and a three-dimensional volumetric memory array disposed on top of the second insulative layer, wherein the three-dimensional volumetric memory array is electrically connected to the non-monocrystalline active-device layer via a plurality of vias through the second insulative layer and between the three-dimensional volumetric memory array and the non-monocrystalline active device layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A method of manufacturing a memory device, the method comprising the steps of:
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providing an insulative substrate; depositing a non-monocrystalline active device layer on the provided substrate; selectively doping the deposited non-monocrystalline active device layer so as to form a plurality of active devices, the active devices having a minimum critical dimension; disposing a three-dimensional volumetric memory array on top of the deposited non-monocrystalline active device layer; and connecting the disposed three-dimensional volumetric memory array to the plurality of active devices formed in the deposited non-monocrystalline active device layer, wherein the thermal budget of the sum of the depositing, the selectively doping, the disposing, and the connecting steps is less than 30% of the minimum critical dimension, wherein the thermal budget measured as a change in the critical dimension resulting from diffusion of carriers in response to the thermal budget.
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26. A method of manufacturing a memory device, the method comprising the steps of:
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providing a substrate; disposing a three-dimensional volumetric memory array on top of the provided substrate; and depositing a non-monocrystalline active device layer on the three-dimensional volumetric memory array; selectively doping the deposited non-monocrystalline active device layer so as to form a plurality of active devices; connecting one or more of the plurality of active devices to the three-dimensional volumetric memory array deposited on the substrate, wherein the thermal budget of the sum of the disposing, the depositing, the selectively doping, and the connecting steps is less than 30% of the minimum critical dimension, wherein the thermal budget measured as a change in the critical dimension resulting from diffusion of carriers in response to the thermal budget.
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Specification