ETCHING COMPOSITION AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING THE SAME
First Claim
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1. An etching composition comprising:
- a peracetic acid mixture;
a fluorine compound;
an acetate series organic solvent; and
water.
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Abstract
An etching composition may include a peracetic acid mixture, a fluorine compound, an organic solvent (e.g., acetate-series organic solvent), and water. The etching composition may be used to selectively etch silicon-germanium (SiGe).
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Citations
21 Claims
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1. An etching composition comprising:
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a peracetic acid mixture; a fluorine compound; an acetate series organic solvent; and water. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An etching composition comprising:
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15 wt % to 75 wt % of a peracetic acid mixture, based on a total weight of the etching composition; 0.01 wt % to 5 wt % of a fluorine compound, based on the total weight of the etching composition; 15 wt % to 65 wt % of an organic solvent, based on the total weight of the etching composition; and water, wherein a sum of respective amounts of the peracetic acid mixture, the fluorine compound, and the organic solvent are less than the total weight of the etching composition. - View Dependent Claims (16, 17, 18, 19, 20)
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21-25. -25. (canceled)
Specification