×

CREATING ION ENERGY DISTRIBUTION FUNCTIONS (IEDF)

  • US 20180166249A1
  • Filed: 12/07/2017
  • Published: 06/14/2018
  • Est. Priority Date: 12/12/2016
  • Status: Active Grant
First Claim
Patent Images

1. A method, comprising:

  • applying a negative jump voltage to an electrode of a process chamber to set a wafer voltage for a wafer; and

    modulating an amplitude of the wafer voltage to produce a predetermined number of pulses, wherein a relative number of pulses at a specific amplitude determines a relative ion fraction at an ion energy corresponding to the specific amplitude.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×