INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

• US 20180172886A1
• Filed: 01/30/2018
• Published: 06/21/2018
• Est. Priority Date: 03/18/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: SANO, Akira
• Granted Patent: US 10,838,125 B2
• Time in Patent Office: Days
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/51 using colour filters
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 5/28 Interference filters
• CPC Class Codes: G02B 6/29358 Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator G02B6/29347, G02B6/29349, G02B6/2935, G02B6/29361 take precedence; resonator evanescently coupled to light guide G02B6/29335

Abstract

A wavelength tunable interference filter includes a fixed substrate, a fixed reflection film that is provided on the fixed substrate, reflects part of incident light, and transmits at least part of the incident light, a movable reflection film that faces the fixed reflection film, reflects part of incident light, and transmits at least part of the incident light, and a fixed electrode that surrounds the fixed reflection film and has a light absorbing layer and a metal layer, and the light absorbing layer is disposed closer to the fixed substrate than the metal layer.

Claims

1. An interference filter comprising:

a first substrate;

a second substrate that is opposing to the first substrate;

a first reflector that is disposed between the first substrate and the second substrate;

a second reflector that is disposed between the first reflector and the second substrate;

a first light absorbing layer that is disposed between the first substrate and the second substrate;

a first metal layer that overlaps the first light absorbing layer, the first light absorbing layer being disposed between the first substrate and the first metal layer; and

a second metal layer that is disposed between the first metal layer and the second substrate,

the first light absorbing layer being disposed so as to contact the first metal layer.

2. The interference filter according to claim 1,

the first reflector overlapping to the first metal layer and the first light absorbing layer.

3. The interference filter according to claim 1, further comprising:

a second absorbing layer that is disposed between the second metal layer and the second substrate.

4. The interference filter according to claim 1, further comprising:

a third absorbing layer that is opposing to the first absorbing layer,

the first absorbing layer and the third absorbing layer sandwiching the first substrate.

5. The interference filter according to claim 1,

the first metal layer being electrically connected to the first reflector.

6. The interference filter according to claim 5, further comprising:

a mirror electrode that is electrically connected to the second reflector.

7-1. An optical filter device comprising:

the interference filter according to claim 1; and

an enclosure that accommodates the interference filter.

8. An optical module comprising:

the interference filter according to claim 1; and

a detector that detects light from the interference filter.

9. An electronic apparatus comprising:

the interference filter according to claim 1; and

a controller that controls the interference filter.

7. An interference filter comprising:

a first substrate;

a first reflector that is disposed on the first substrate;

a second reflector that is disposed on the first reflector;

a first light absorbing layer that is disposed on the first substrate;

a first metal layer that overlaps the first light absorbing layer, the first light absorbing layer being disposed between the first substrate and the first metal layer; and

a second metal layer that is disposed on the first metal layer,

the first light absorbing layer being disposed so as to contact the first metal layer.