MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND METHOD FOR MANUFACTURING THE SAME

• US 20180179048A1
• Filed: 12/15/2017
• Published: 06/28/2018
• Est. Priority Date: 06/15/2015
• Status: Active Grant

• Current Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Original Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Inventors: SCHENK, Harald, CONRAD, Holger, GAUDET, Matthieu, SCHIMMANZ, Klaus, LANGA, Sergiu, KAISER, Bert
• Granted Patent: US 10,457,544 B2
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2201/032 Bimorph and unimorph actuators, e.g. piezo and thermo
• CPC Class Codes: B81B 2201/036 Micropumps
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 2203/0136 Comb structures
• CPC Class Codes: B81B 2203/0172 Flexible holders not provided for in B81B2203/0154 - B81B2203/0163
• CPC Class Codes: B81B 2203/019 characterized by their profile
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: B81C 1/00182 Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
• CPC Class Codes: H04R 1/023 Screens for loudspeakers
• CPC Class Codes: H04R 1/08 Mouthpieces; Microphones; Attachments therefor
• CPC Class Codes: H04R 15/00 Magnetostrictive transducers magnetostrictive elements in general H10N30/00
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 19/005 : using semiconductor materials
• CPC Class Codes: H04R 2201/003 : Mems transducers or their use of the electrostatic type H04R19/005
• CPC Class Codes: H04R 23/002 : using electrothermic-effect transducer
• CPC Class Codes: H04R 2499/11 : Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
• CPC Class Codes: H04R 9/02 : Details

Abstract

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Claims

1. A MEMS transducer for interacting with a volume flow of a fluid, comprising:

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the deformation of the deformable element is a curvature of the deformable element in-plane with respect to the substrate.

2. The MEMS transducer according to claim 1, wherein the electromechanical transducer is connected to the substrate in a force-fitted or in a form-fitted manner.

3. The MEMS transducer according to claim 1, wherein the deformable element comprises an active bending bar and is configured to contact the volume flow of the fluid.

4. The MEMS transducer according to claim 1, wherein the electromechanical transducer is configured to, in response to an electrical drive, causally cause a movement of the fluid in the cavity and/or, in response to the movement of the fluid in the cavity, to causally provide an electrical signal.

5. The MEMS transducer according to claim 1, comprising a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, which is configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable between the first and second time intervals.

6. The MEMS transducer according to claim 1, comprising a multitude of electromechanical transducers connected to the substrate and each comprising an element deformable along the lateral movement direction;

wherein a first subcavity is arranged between a first electromechanical transducer and a second electromechanical transducer and a second subcavity is arranged between the second electromechanical transducer and a third electromechanical transducer.

7. The MEMS transducer according to claim 6, wherein the first, second and third electromechanical transducers are configured to causally cause a movement of the fluid in the cavity in response to an electrical drive;

and wherein the first and the second electromechanical transducer are configured to change a volume of the first subcavity with a first frequency, wherein the first and the third electromechanical transducer are configured to change a volume of the second subcavity with a second frequency.

8. The MEMS transducer according to claim 6, wherein the first subcavity and the second subcavity comprise resonance frequencies different from each other.

9. The MEMS transducer according to claim 8, and wherein the first and the second electromechanical transducer are configured to change a volume of the first subcavity with a first frequency, wherein the first and the third electromechanical transducer are configured to change a volume of the second subcavity with a second frequency.

10. The MEMS transducer according to claim 6, wherein the volume flow and the deformation of the deformable element are causally related with the change of the volumes of the first subcavity and the second subcavity.

11. The MEMS transducer according to claim 6, comprising a wall structure arranged between the first subcavity and the second subcavity and being configured to at least partially reduce a fluidic coupling between the first subcavity and the second subcavity.

12. The MEMS transducer according to claim 6, wherein the deformable elements of the first electromechanical transducer, the second electromechanical transducer and the third electromechanical transducer comprise a bar actuator, comprising a first and a second end, respectively, wherein the bar actuator of the first electromechanical transducer is connected to the substrate at the first end and the second end, wherein the bar actuator of the second electromechanical transducer or of the third electromechanical transducer is connected to the substrate in a center region of the bar actuator.

13. The MEMS transducer according to claim 6, wherein the substrate comprises a multitude of openings connected to a multitude of subcavities of the cavity, wherein a volume of each subcavity is affected by a deflection state of at least one element deformable along the lateral movement direction, wherein two neighboring subvolumes of subcavities may be complimentary increased or decreased in size during the first or the second time interval.

14. The MEMS transducer according to claim 6, wherein the substrate comprises a multitude of openings connected to a multitude of subcavities of the cavity, wherein a volume of each subcavity is affected by a deflection state of at least one element deformable along the lateral movement direction, wherein values of sound pressure levels acquired based on the deformation of the deformable elements and based on the subcavities comprise a connection with a frequency of the volume flow flowing out of or into the respective subcavity, which may be represented as a function.

15. The MEMS transducer according to claim 14, wherein the frequency of the volume flow describes a frequency-dependent course of a pressure in the fluid.

16. The MEMS transducer according to claim 1, wherein a first subcavity adjacent to an opening of the substrate is arranged between the bar structures of the first electromechanical transducer and of the second electromechanical transducer.

17. The MEMS transducer according to claim 6, wherein the deformable elements of the first electromechanical transducer, of the second electromechanical transducer and of the third electromechanical transducer comprise a bar actuator, comprising a first and a second end each, wherein the bar actuator of the first electromechanical transducer is connected to the substrate at the first end and at the second end, wherein the bar actuator of the second electromechanical transducer or of the third electromechanical transducer is connected to the substrate in a center region of the bar actuator;

and

wherein a first subcavity adjacent to an opening of the substrate is arranged between the bar structures of the first electromechanical transducer and of the second electromechanical transducer.

18. The MEMS transducer according to claim 1, wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved in-plane with respect to the substrate.

19. The MEMS transducer according to claim 1, wherein the deformable element is formed to be active and is configured to interact with the volume flow, or wherein a plate element connected to the first deformable element and configured to be rigid is configured to interact with the volume flow.

20. The MEMS transducer according to claim 1, wherein the electromechanical transducer comprises a plurality of deformable elements at least indirectly connected in an axial direction of the electromechanical transducer, which are configured to each affect a volume of a first and of a second subcavity portion.

21. The MEMS transducer according to claim 20, wherein the electromechanical transducer is configured to, in response to an electrical drive, causally cause a movement of the fluid in the first and the second subcavity portion, wherein the deformable elements are configured to change the volumes of the first and the second subcavity portion with a frequency different from each other.

22. The MEMS transducer according to claim 1, wherein a volume of the cavity is affected by a first layer, a second layer and a first and a second side region, wherein the first and the second side region are arranged between the first and the second layer, wherein the deformable element is configured to carry out a movement parallel to the first or the second layer at least in one portion.

23. The MEMS transducer according to claim 22, wherein the deformable element is arranged contactless to the first and the second layer, or wherein a low-friction layer is arranged between the deformable element and the first layer or the second layer.

24. The MEMS transducer according to claim 22, comprising a layer stack, wherein the layer stack comprises the first layer, an intermediate layer, a first spacer layer arranged between the first layer and the intermediate layer, the second layer and a second spacer layer arranged between the intermediate layer and the second layer, wherein the deformable element is connected to the intermediate layer.

25. The MEMS transducer according to claim 24, wherein the first or the second spacer layer comprises a dimension along a direction, along which the first and second spacer layers are arranged at the intermediate layer, comprising a value in a range of at least 1 nm and at most 1 mm, advantageously in a range of at least 20 nm and at most 100 μ

m and particularly advantageously in a range of at least 50 nm and at most 1 μ

m.

26. The MEMS transducer according to claim 1, wherein an extent of a fluid flow circumflowing the electromechanical transducer from a first side to a second side of the electromechanical transducer, while the deformable element is deformed, is smaller than an extent of the volume flow in the cavity.

27. The MEMS transducer according to claim 26, wherein the extent of the fluid flow circumflowing the electromechanical transducer is smaller than or equal to the extent of the volume flow divided by the value 10.

28. The MEMS transducer according to claim 1, wherein the deformable element is configured to be deformed along the lateral movement direction and along an opposite direction.

29. The MEMS transducer according to claim 1, wherein the deformable element comprises a bar structure and is configured to be curved in-plane with respect to the substrate.

30. The MEMS transducer according to claim 1, wherein the deformable element is configured as a bimorph comprising an actuation direction along which the deformable element is deflectable by applying an electrical voltage.

31. The MEMS transducer according to claim 30, wherein the deformable element comprises a first, a second and a third bar segment arranged in this order along the axial direction and each comprising oppositely directed actuation directions.

32. The MEMS transducer according to claim 31, wherein the electromechanical transducer comprises a first and a second deformable element, wherein an outer bar segment of the first deformable element and an outer bar segment of the second deformable element are at least indirectly connected to each other.

33. The MEMS transducer according to claim 1, wherein the deformable element comprises at least three bar segments connected in series to each other, wherein at least a first, a second and a third bar element comprise oppositely directed actuation directions and comprise a different bar length.

34. The MEMS transducer according to claim 33, wherein the deformable element is clamped on two sides.

35. The MMES transducer according to claim 1, wherein the substrate comprises an anchor element;

wherein the deformable element is connected to the anchor element in a center region of an axial extension direction of the deformable element;

or

wherein the deformable element is connected to a further deformable element at an outer bar segment via the anchor element.

36. The MEMS transducer according to claim 1, wherein the deformable element comprises a first layer and a second layer, wherein spacers are arranged between the first layer and the second layer, wherein the first layer and the second layer are connected via the spacers, wherein the spacers are arranged in an inclination direction obliquely to a course of the first and the second layer, wherein an attraction force between the first layer and the second layer causes bending of the deformable element.

37. The MEMS transducer according to claim 1, wherein the deformable element comprises a bar structure, wherein the bar structure is fixedly clamped at a first and a second end.

38. The MEMS transducer according to claim 1, wherein the electromechanical transducer is formed as electrostatic transducer, piezoelectric transducer, electromagnetic transducer, electrodynamic transducer, thermomechanical transducer or magnetostrictive transducer.

39. The MEMS transducer according to claim 38, wherein the electromechanical transducer is formed as an electrostatic transducer, wherein the MEMS transducer further comprises a first electrode extending along an axial direction of the deformable element, wherein the deformable element comprises a second electrode, wherein an electrical potential may be applied between the first electrode and the second electrode to generate an electrostatic force between the first electrode and the second electrode, wherein the deformable element is configured to carry out the deformation along the lateral movement direction based on the electrostatic force.

40. The MEMS transducer according to claim 39, wherein, in a state of the deformable element not affected by the volume flow or the electrical potential, a distance between the deformable element and the first electrode varies along the axial direction of the deformable element, wherein the distance comprises a minimum distance in a region at which the electromechanical transducer comprises a connection to the substrate.

41. The MEMS transducer according to claim 1, wherein the electromechanical transducer comprises a first deformable element, a second deformable element and a plate element, wherein the deformable elements are configured to be deformed along the lateral movement direction, wherein the first deformable element and the second deformable element are arranged opposite to each other so that deflectable ends of the first and second deformable elements are arranged facing each other, wherein the plate element is connected to the deflectable ends, wherein the deformation of the deformable elements and a movement of the plate element along the movement direction are causally related.

42. The MEMS transducer according to claim 41, wherein a further plate element is arranged along the movement direction, wherein a volume arranged between the plate element and the further plate element is changed based on the volume flow or based on an actuation of the electromechanical transducer.

43. The MEMS transducer according to claim 1, wherein the electromechanical transducer comprises a first and a second deformable element connected along an axial extension direction of the first or the second deformable element, wherein a spring element is arranged between the first and the second deformable element.

44. The MEMS transducer according to claim 43, wherein the spring element comprises a lower rigidity along the lateral movement direction than in a direction perpendicular to the lateral movement direction.

45. The MEMS transducer according to claim 1, wherein the electromechanical transducer is obliquely arranged with respect to a lateral main extension direction of the substrate.

46. The MEMS transducer according to claim 1, wherein the substrate comprises a substrate spring element adjacent to a region at which the electromechanical transducer is connected to the substrate.

47. The MEMS transducer according to claim 1, wherein the electromechanical transducer comprises a plate element configured to be moved along the lateral movement direction such that a plate surface of the plate element is moved along the movement direction.

48. The MEMS transducer according to claim 47, wherein the plate element comprises an electrode which may be connected to an electrical potential, wherein the plate element is configured

to generate an electrostatic force opposite to a further electrode, wherein the electrostatic force causes the deformation of the deformable element along the lateral movement direction;

or

to cause the deformation of the deformable element along the lateral movement direction based on the volume flow, wherein the electrical potential may be affected based on the deformation.

49. The MEMS transducer according to claim 47, wherein a spring element is arranged between the deformable element and the plate element.

50. The MEMS transducer according to claim 47, wherein at least one further deformable element is arranged between the deformable element and the plate element, which is configured to increase an actuator travel of the deformable element.

51. The MEMS transducer according to claim 41, wherein the deformable element comprises an opening so that a subvolume of the cavity, which is arranged on a side of the deformable element facing away from the plate element, extends through the deformable element in a direction of the plate element.

52. The MEMS transducer according to claim 1, wherein the cavity comprises an opening in the substrate, which is arranged perpendicular to the lateral movement direction, so that the volume flow flows perpendicular to the lateral movement direction out of the cavity or into the cavity based on the deformation of the deformable element.

53. The MEMS transducer according to claim 52, wherein the opening comprises a cross-section variable along an axial direction, decreasing from an outside of the MEMS transducer towards the cavity.

54. The MEMS transducer according to claim 52, wherein the opening comprises a variable cross-section along a thickness direction perpendicular to an axial direction, decreasing from an outside of the MEMS transducer towards the cavity.

55. The MEMS transducer according to claim 51, wherein the first and second deformable elements are arranged adjacent to the opening.

56. The MEMS transducer according to claim 1, wherein the cavity comprises an opening in the substrate, wherein at least one bar element is formed in a region of the opening so that the volume flow circumflows the bar element.

57. The MEMS transducer according to claim 56, comprising a multitude of bar elements, wherein neighboring bar elements comprise a distance to each other, which is less than 5 μ

m.

58. The MEMS transducer according to claim 1, wherein the cavity comprises an opening in the substrate, wherein a cover is arranged in a region of the opening.

59. The MEMS transducer according to claim 1, wherein the cavity comprises an opening in the substrate, wherein a valve structure is arranged in a region of the opening, configured to reduce a passage of the volume flow through the opening along at least one direction out of the cavity and/or into the cavity.

60. The MEMS transducer according to claim 59, wherein the valve structure is formed to be active.

61. The MEMS transducer according to claim 60, wherein the deformable element is formed to be active and wherein the valve structure is based on the same actuator principle as the deformable element.

62. The MEMS transducer according to claim 60, comprising a control device configured to drive the valve structure such that a pressure pulse is generated in the fluid flow.

63. The MEMS transducer according to claim 1, further comprising a membrane element arranged to at least partially prevent exit of the volume flow out of the cavity or entry of the volume flow into the cavity, wherein a deflection of the membrane element may be caused based on the volume flow.

64. The MEMS transducer according to claim 63, wherein the cavity comprises an opening in the substrate, wherein the membrane element is arranged in a region of the opening.

65. The MEMS transducer according to claim 1, which is arranged in a MEMS stack with at least one second MEMS transducer according to claim 1.

66. The MEMS transducer according to claim 65, wherein the electromechanical transducers of the MEMS transducer and of the second MEMS transducer may be driven together.

67. The MEMS transducer according to claim 65, wherein a cap surface of the MEMS transducer forms an outside of the stack, wherein the MEMS transducer comprises an opening in the cap surface arranged facing away from a side facing the second MEMS transducer, wherein the volume flow of the MEMS transducer exits from or enters into the cavity in a perpendicular or opposite manner to the volume flow of the second MEMS transducer.

68. The MEMS transducer according to claim 65, wherein the cavity of the MEMS transducer and the cavity of the second MEMS transducer are connected to each other.

69. The MEMS transducer according to claim 65, wherein the cavity of the MEMS transducer and the cavity of the second MEMS transducer comprise a resonance frequency different from each other.

70. The MEMS transducer according to claim 1, wherein the deformable element comprises an axial extension comprising a value in a range of at least 1 μ

m and at most 100 mm, advantageously of at least 100 μ

m and at most 10 mm and particularly advantageously a value in a range of at least 500 μ

m and at most 5 mm.

71. The MEMS transducer according to claim 1, wherein the deformable element comprises an extension along the lateral movement direction comprising a value in a range of at least 0.1 μ

m and at most 1000 μ

m, advantageously of at least 1 μ

m and at most 100 μ

m and particularly advantageously a value in a range of at least 5 μ

m and at most 30 μ

m.

72. The MEMS transducer according to claim 1, wherein the deformable element comprises an extension along a direction arranged perpendicular to the lateral movement direction, wherein the extension comprises a value in a range of at least 0.1 μ

m and at most 1000 μ

m, advantageously of at least 1 μ

m and at most 300 μ

m and particularly advantageously a value in a range of at least 10 μ

m and at most 100 μ

m.

73. The MEMS transducer according to claim 1, comprising at least one deformable sensor element and at least one deformable actuator element.

75. A MEMS loudspeaker comprising a MEMS transducer, wherein the MEMS transducer is the MEMS transducer according to claim 1 or comprises:

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the lateral movement direction extends in-plane with respect to the substrate;

a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable during the first and second time intervals;

wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved along an axial direction of the bar structure;

wherein the first deformable element is formed to be active and is configured to interact with the volume flow, or a plate element connected to the first deformable element is configured to be rigid is configured to interact with the volume flow,

wherein the volume flow is an acoustic soundwave or an ultrasonic wave.

76. A MEMS pump comprising a MEMS transducer, wherein the MEMS transducer is the MEMS transducer according to claim 1 or comprises:

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the lateral movement direction extends in-plane with respect to the substrate;

a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable during the first and second time intervals;

wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved along an axial direction of the bar structure;

wherein the first deformable element is formed to be active and is configured to interact with the volume flow, or a plate element connected to the first deformable element is configured to be rigid is configured to interact with the volume flow,

wherein the cavity comprises a first opening and a second opening in the substrate, wherein the electromechanical transducer is configured to provide the volume flow based on the fluid and to transport the fluid through the first opening in a direction of the cavity based on an actuation of the electromechanical transducer or to transport the fluid through the second opening in a direction away from the cavity based on the actuation.

77. A MEMS microphone comprising a MEMS transducer, wherein the MEMS transducer is the MEMS transducer according to claim 1 or comprises:

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the lateral movement direction extends in-plane with respect to the substrate;

a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable during the first and second time intervals;

wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved along an axial direction of the bar structure;

wherein the first deformable element is formed to be active and is configured to interact with the volume flow, or a plate element connected to the first deformable element is configured to be rigid is configured to interact with the volume flow,

wherein an electrical signal may be acquired at a terminal of the electromechanical transducer based on the deformation of the deformable element, wherein the deformation may be caused based on the volume flow.

78. A MEMS system, comprising:

a MEMS transducer, wherein the MEMS transducer is the MEMS transducer according to claim 1 or comprises;

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the lateral movement direction extends in-plane with respect to the substrate;

a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable during the first and second time intervals;

wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved along an axial direction of the bar structure;

wherein the first deformable element is formed to be active and is configured to interact with the volume flow, or a plate element connected to the first deformable element is configured to be rigid is configured to interact with the volume flow; and

a control device configured to drive the deformation of the deformable element or to detect the deformation of the deformable element.

79. The MEMS system according to claim 78, wherein the MEMS transducer comprises a multitude of electromechanical transducers, wherein the control device is configured to drive the multitude of electromechanical transducers such that a first and a neighbouring second electromechanical transducer at least locally move towards each other during a first time interval, and wherein the control device is configured to drive the multitude of electromechanical transducers such that the first electromechanical transducer and a third electromechanical transducer arranged adjacent to the first electromechanical transducer, wherein the first electromechanical transducer is arranged between the second and the third electromechanical transducer, move towards each other during a second time interval.

80. The MEMS system according to claim 78, comprising at least one further MEMS transducer, wherein the cavity of the further MEMS transducer comprises a resonance frequency different from a resonance frequency of the cavity of the MEMS transducer, wherein the control device is configured to detect the deformation of the deformable element of the MEMS transducer and of the further MEMS transducer and to compute a Fourier synthesis based on the electrical signals.

81. The MEMS system according to claim 78, comprising at least one further MEMS transducer, wherein the cavity of the further MEMS transducer comprises a resonance frequency different from a resonance frequency of the cavity of the MEMS transducer, wherein the control device is configured to drive the deformation of the deformable element of the MEMS transducer and of the further MEMS transducer with frequencies different from each other.

74. A MEMS transducer for interacting with a volume flow of a fluid, comprising:

a substrate comprising a cavity;

an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

wherein the lateral movement direction extends in-plane with respect to the substrate;

a first and a second electromechanical transducer connected to the substrate and each comprising an element deformable along the lateral movement direction, configured to be deformed along the lateral movement direction, wherein the first electromechanical transducer and the second electromechanical transducer are configured to move towards each other during a first time interval and to move away from each other during a second time interval, wherein a volume of a subcavity between the first electromechanical transducer and the second electromechanical transducer is variable during the first and second time intervals;

wherein a first deformable element of the first electromechanical transducer and a second deformable element of the second electromechanical transducer comprise a bar structure configured to be curved along an axial direction of the bar structure;

wherein the first deformable element is formed to be active and is configured to interact with the volume flow, or a plate element connected to the first deformable element is configured to be rigid is configured to interact with the volume flow.

82. A method for manufacturing a MEMS transducer, comprising:

providing a substrate comprising a cavity;

manufacturing, at the substrate in the cavity, an electromechanical transducer comprising an element deformable along a lateral movement direction, so that a deformation of the deformable element is a curvature of the deformable element in-plane with respect to the substrate,

so that the deformation of the deformable element along the lateral movement direction and a volume flow of a fluid are causally related.

83. The method according to claim 82, further comprising arranging a low-friction layer, wherein the low-friction layer is arranged in a region between the deformable element and a neighboring layer.