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ORIENTED ALUMINA SUBSTRATE FOR EPITAXIAL GROWTH

  • US 20180179665A1
  • Filed: 02/22/2018
  • Published: 06/28/2018
  • Est. Priority Date: 09/30/2015
  • Status: Active Grant
First Claim
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1. An oriented alumina substrate for epitaxial growth, comprising:

  • crystalline grains constituting a surface thereof,the crystalline grains having a tilt angle of 1°

    or more and 3°

    or less and an average sintered grain size of 20 μ

    m or more.

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