VACUUM VALVE

• US 20180195639A1
• Filed: 01/07/2018
• Published: 07/12/2018
• Est. Priority Date: 01/12/2017
• Status: Abandoned Application

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: KOGAME, Masahito
• Application Number:
  US15/863,934
• Publication Number:
  US 20180195639A1
• Time in Patent Office: Days
• CPC Class Codes: F16K 3/0281 Guillotine or blade-type valves, e.g. no passage through the valve member
• CPC Class Codes: F16K 3/06 in the form of closure plates arranged between supply and discharge passages F16K3/10 takes precedence
• CPC Class Codes: F16K 41/023 for spindles which only rotate, i.e. non-rising spindles F16K41/043, F16K41/063 and F16K41/083 take precedence
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A vacuum valve comprises: a valve body configured to house a valve plate; a drive shaft configured to openably/closably drive the valve plate; a shaft seal configured to vacuum-seal the drive shaft; and an entrance prevention wall configured to prevent a particle from entering the shaft seal.

Claims

1. A vacuum valve comprising:

a valve body configured to house a valve plate;

a drive shaft configured to openably/closably drive the valve plate;

a shaft seal configured to vacuum-seal the drive shaft; and

an entrance prevention wall configured to prevent a particle from entering the shaft seal.

2. The vacuum valve according to claim 1, further comprising:

a seal holding member configured to hold the shaft seal,

wherein a valve-body-side end portion of the seal holding member protrudes from an inner peripheral surface of the valve body to form the entrance prevention wall.

3. The vacuum valve according to claim 1, wherein

the valve body is provided with a through-hole, the drive shaft penetrating the through-hole and the shaft seal being arranged in the through-hole, and

the entrance prevention wall is provided at a periphery of the through-hole to protrude from the inner peripheral surface of the valve body.

4. The vacuum valve according to claim 2, wherein

a portion of the valve plate fixed to the drive shaft faces an entire area of an end surface of the entrance prevention wall in a protruding direction thereof.

5. The vacuum valve according to claim 3, wherein

a portion of the valve plate fixed to the drive shaft faces an entire area of an end surface of the entrance prevention wall in a protruding direction thereof.