MEMS Device and Method of Manufacturing a MEMS Device
First Claim
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1. A method for manufacturing microelectromechanical systems (MEMS) devices, the method comprising:
- forming a MEMS stack over a first main surface of a substrate;
forming a polymer layer over a second main surface of the substrate;
forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack;
forming a second opening in the polymer layer while forming the first opening in the polymer layer;
filling the second opening with an etch stop material; and
after filling the second opening with the etch stop material, etching the substrate to extend the first opening into the substrate.
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Abstract
A method for manufacturing a MEMS device is disclosed. Moreover a MEMS device and a module including a MEMS device are disclosed. An embodiment includes a method for manufacturing MEMS devices includes forming a MEMS stack over a first main surface of a substrate, forming a polymer layer over a second main surface of the substrate and forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack.
3 Citations
22 Claims
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1. A method for manufacturing microelectromechanical systems (MEMS) devices, the method comprising:
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forming a MEMS stack over a first main surface of a substrate; forming a polymer layer over a second main surface of the substrate; forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack; forming a second opening in the polymer layer while forming the first opening in the polymer layer; filling the second opening with an etch stop material; and after filling the second opening with the etch stop material, etching the substrate to extend the first opening into the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing microelectromechanical systems (MEMS) devices, the method comprising:
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forming a MEMS stack over a first main surface of a substrate; thinning the substrate to expose a second main surface; forming an etch stop layer over the second main surface of the substrate; patterning the etch stop layer to expose portions of the second main surface directly over the MEMS stack; depositing a polymer layer covering the patterned etch stop layer and the exposed second main surface; forming a first opening and a second opening in the polymer layer such that the first opening is formed directly over the MEMS stack; extending the first opening into the substrate without extending the second opening; and performing a release etch to form moveable components of the MEMS devices. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A method for manufacturing microelectromechanical systems (MEMS) devices, the method comprising:
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forming a MEMS stack over a first main surface of a substrate; thinning the substrate to expose a second main surface; forming a polymer layer over the second main surface; patterning the polymer layer to form a first opening and a second opening, wherein the first opening overlaps with the MEMS stack; filling the second opening with a masking layer; extending the second opening into the substrate such that the first opening abuts the MEMS stack; removing the masking layer after the extending; and performing a release etch to form moveable components of the MEMS devices. - View Dependent Claims (20, 21, 22)
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Specification