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REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

  • US 20180203248A1
  • Filed: 01/16/2017
  • Published: 07/19/2018
  • Est. Priority Date: 01/16/2017
  • Status: Active Grant
First Claim
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1. A method comprising:

  • producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration;

    for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse;

    forming a light beam of pulses at least from the modified pulses; and

    directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

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