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WAFER CASSETTE

  • US 20180211860A1
  • Filed: 03/13/2017
  • Published: 07/26/2018
  • Est. Priority Date: 01/20/2017
  • Status: Active Grant
First Claim
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1. A wafer cassette comprising:

  • a case including a pivot and an accommodation space; and

    a plurality of carriers, wherein each of the carriers includes a pivotal hole and a carrying base for carrying a wafer, and each of the carriers is pivotally and movably mounted to the pivot through the pivotal hole, wherein each of the carriers selectively pivots around the pivot to lead the carrying base to accommodate in the accommodation space or depart from the accommodation space.

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