WAFER CASSETTE

• US 20180211860A1
• Filed: 03/13/2017
• Published: 07/26/2018
• Est. Priority Date: 01/20/2017
• Status: Active Grant

• Current Assignee: Chipbond Technology Corporation
• Original Assignee: Chipbond Technology Corporation
• Inventors: Kuo, Chien-Ming, Chang, Hung-Ching
• Granted Patent: US 10,242,899 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• CPC Class Codes: H01L 21/6732 Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67383 characterised by substrate supports
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

A wafer cassette for storing wafers comprises a case and a plurality of carriers for carrying the wafers. Each of the carriers is pivotally and movably mounted to a pivot of the case, and can selectively accommodate in or depart from an accommodation space of the case for benefit of the wafer loading or unloading.

Claims

1. A wafer cassette comprising:

a case including a pivot and an accommodation space; and

a plurality of carriers, wherein each of the carriers includes a pivotal hole and a carrying base for carrying a wafer, and each of the carriers is pivotally and movably mounted to the pivot through the pivotal hole, wherein each of the carriers selectively pivots around the pivot to lead the carrying base to accommodate in the accommodation space or depart from the accommodation space.

2. The wafer cassette in accordance with claim 1, wherein the carrying base includes a frame and an accommodation groove for accommodating the wafer, the frame surrounds the accommodation groove and includes a first opening, wherein the first opening communicates with the accommodation groove.

3. The wafer cassette in accordance with claim 2, wherein the first opening is substantially a circular opening which is not smaller in diameter than the wafer.

4. The wafer cassette in accordance with claim 3, wherein the carrying base includes a carrying plate for carrying the wafer, the carrying plate connects with the frame and is located in the accommodation groove.

5. The wafer cassette in accordance with claim 2, wherein an internal side surface of the frame is an oblique side surface facing toward the first opening.

6. The wafer cassette in accordance with claim 2, wherein each of the carriers includes a handle portion connecting with the frame of the carrying base.

7. The wafer cassette in accordance with claim 6, wherein the case includes a second restricting rod and the accommodation space includes a second opening located between the pivot and the second restricting rod, and wherein the handle portion is stopped by the second restricting rod when the carrying base accommodates in the accommodation space.

8. The wafer cassette in accordance with claim 7, wherein the handle portion is located outside of the accommodation space when the handle portion is stopped by the second restricting rod.

9. The wafer cassette in accordance with claim 7, wherein a second magnetic component is disposed on the handle portion, and the handle portion is positioned on the second restricting rod by the second magnetic component when the handle portion is stopped by the second restricting rod.

10. The wafer cassette in accordance with claim 2, wherein the case includes a first restricting rod and each of the carriers includes a pivotal portion connecting with the frame of the carrying base, the pivotal hole is located on the pivotal portion, and wherein the pivotal portion is stopped by the first restricting rod when the carrying base departs from the accommodation space.

11. The wafer cassette in accordance with claim 10, wherein a first magnetic component is disposed on the pivotal portion, and the pivotal portion is positioned on the first restricting rod by the first magnetic component when the pivotal portion is stopped by the first restricting rod.

12. The wafer cassette in accordance with claim 1, wherein the case includes a supporting element having a plurality of carrying parts, and wherein each of the supporting parts supports the carrying base when the carrier accommodates in the accommodation space.

13. The wafer cassette in accordance with claim 12, wherein the case includes a second restricting rod and the accommodation space includes a second opening located between the pivot and the second restricting rod, and wherein a triangle supporting frame is constituted by the pivot, the second restricting rod and the supporting element.

14. The wafer cassette in accordance with claim 1 further comprises a plurality of spacers, wherein each of the spacers is mounted on the pivot and positioned between each adjacent pair of the carriers.

15. The wafer cassette in accordance with claim 14, wherein each of the carriers includes a pivotal portion, and the pivotal hole is located on the pivotal portion, wherein each of the spacers is positioned between each adjacent pair of the pivotal portions.

16. The wafer cassette in accordance with claim 1 further comprises a plurality of bearings, wherein each of the bearings includes a through hole and is coupled with a pivotal portion of each of the carriers, and wherein the pivotal hole is located on the pivotal portion and corresponding to the through hole, and the pivot penetrates through the pivotal hole and the through hole.

17. The wafer cassette in accordance with claim 2, wherein the frame includes at least one loading/unloading hole which laterally communicates with the accommodation space.

18. The wafer cassette in accordance with claim 7 further comprises a stop rod pivotally and movably mounted on the case, wherein the handle portion is restricted between the second restricting rod and the stop rod when the carrying base accommodates in the accommodation space.

19. The wafer cassette in accordance with claim 1, wherein a mark is located on each of the carriers.

20. The wafer cassette in accordance with claim 19, wherein each of the carriers includes a handle portion, and the mark is located on the handle portion.