Anti-Reflective Coating with High Refractive Index Material at Air Interface

• US 20180219034A1
• Filed: 02/01/2017
• Published: 08/02/2018
• Est. Priority Date: 02/01/2017
• Status: Active Grant

• Current Assignee: Omnivision Technologies Incorporated (Will Semiconductor Co., Ltd. Shanghai)
• Original Assignee: Omnivision Technologies Incorporated (Will Semiconductor Co., Ltd. Shanghai)
• Inventors: Fan, Chun-Sheng, Tsai, Chen-Wei, Lin, Wei-Feng
• Granted Patent: US 10,644,048 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 27/1462 Coatings
• CPC Class Codes: H01L 27/14627 Microlenses

Abstract

An optical element comprising a transparent substrate and an anti-reflective coating, wherein the anti-reflective coating further comprises at least a transparent, high refractive index layer and a transparent, low refractive index layer, wherein the high refractive index layer is in contact with the low refractive index layer; and wherein the high refractive index layer is situated at an interface between the anti-reflective coating and air. Further, the low refractive index layer may be silicon oxide; the high refractive index layer may be tantalum oxide or silicon nitride.

Claims